Abstract: Provided are a diffraction-based metrology apparatus having high measurement sensitivity, a diffraction-based metrology method capable of accurately performing measurement on a semiconductor device, and a method of manufacturing a semiconductor device using the metrology method. The diffraction-based metrology apparatus includes a light source that outputs a light beam, a stage on which an object is placed, a reflective optical element that irradiates the light beam onto the object through reflection, such that the light beam is incident on the object at an inclination angle, the inclination angle being an acute angle, a detector that detects a diffracted light beam that is based on the light beam reflected and diffracted by the object and a processor that measures a 3D pupil matrix for the diffracted light beam and analyze the object based on the 3D pupil matrix.

Abstract: An apparatus for analyzing an element of a photolithography process, said apparatus comprising: (a) a first measuring apparatus for recording first data of the element; and (b) means for transforming the first data into second, non-measured data, which correspond to measurement data of a measurement of the element with a second measuring apparatus; (c) wherein the means comprise a transformation model, which has been trained using a multiplicity of first data used for training purposes and second data corresponding therewith, which are linked to the second measuring apparatus.

Abstract: Computer systems, methods, and apparatuses for estimating changes in gas emissions are described. A computer system may monitor overall emission levels based on sensor outputs from a plurality of gas sensors in a facility. The computer system may estimate a total emission level over a time interval based on the accumulative, gas-response-factor weighted detections of the gas sensors. Emissions from maintenance activities may be excluded as appropriate. The total emission level may be compared with total emission level estimated from different time intervals and/or different facilities. The computer system may be further used for comparing emissions across multiple facilities, or emissions from facilities across multiple regions.

Abstract: Apparatus, methods, and systems for determining acoustic velocity behind casing or tubing in a subterranean wellbore. A method may include obtaining a plurality of waveform data sets corresponding to a plurality of propagation path regimes and obtaining a total wavefield across the receiver array. The method may also include determining a Green's function representing each of the plurality of propagation path regimes and determining a noise wavefield by convolving the Green's functions and a known transmitted pressure signal corresponding to the plurality of waveform data sets. The method may also include generating a reduced-noise wavefield by subtracting the noise wavefield from the total wavefield and estimating the acoustic velocity of a formation behind the casing or tubing from the reduce-noise wavefield.

Abstract: An extrinsic calibration method of multiple 3D LiDAR sensors for an autonomous navigation system is proposed, the method including collecting point clouds by each of the multiple 3D LiDAR sensors; extracting multiple target planes corresponding to a plane from the point clouds of each of the 3D LiDAR sensors; by using the target plane of any one of the multiple 3D LiDAR sensors as a reference plane, detecting a corresponding plane from the target planes of each of the remaining of the 3D LiDAR sensors on the basis of a similarity with the reference plane; calculating initial extrinsic parameters for matching between the reference plane and the corresponding plane based on plane parameters of the reference plane and corresponding plane corresponding to each other; and calculating final extrinsic parameters that minimize variance of measurement points for the reference plane and corresponding plane, on the basis of the initial extrinsic parameters.

Abstract: Discussed herein are devices, systems, and methods for rule-based weather impact assessment. A method can include receiving, by a user interface, a request for environmental condition impact data for specified equipment at a specified location, retrieving weather model data for the specified location, comparing the retrieved weather model data to user-defined rules associated with the specified equipment, and providing, by the user interface, a graphic depiction indicating whether the user-defined rule is satisfied in the specified location based on the comparison.

Abstract: A method and system for determining a treatment outcome prediction for a patient using electroencephalograph (EEG) are disclosed, which include analyzing a brain region mutual interaction characteristics using scalp EEG data from a patient and obtaining a set of brain region mutual interaction feature matrices, performing a feature enhancement process to the brain region mutual interaction feature matrices to extract prominent mutual interaction features and applying a treatment response predictive model to determine a treatment outcome prediction for the patient. Further disclosed is a method of generating a treatment response predictive model using EEG dataset of a group of patients under a clinical treatment. The method and system can be used for determining a treatment outcome prediction for a psychiatric disorder patient and a patient diagnosed with COVID-19 and suffering from psychiatric disorder symptom(s) originated from COVID-19.

Abstract: The embodiments of the present disclosure provide a safety monitoring method and a safety monitoring Internet of Things system of pipe network reliability degree based on intelligent gas, wherein the method is executed by an intelligent gas pipe network safety management based on the safety monitoring Internet of Things system of pipe network reliability degree, including: obtaining reliability degree influence feature of a pipe network node; and the reliability degree influence feature include at least one of intrinsic features, and extrinsic features; determining reliability degree of the pipe network node based on the reliability degree influence feature; and determining a monitoring scheme based on the reliability degree of the pipe network node. The monitoring scheme includes a key pipe network node to be monitored.

Abstract: The embodiments of the present disclosure provide a method for predicting a gate station filter replacement at a gate station for smart gas and an Internet of Things system. The method includes: obtaining, by a smart gas data center, usage information of a filter element through a smart gas sensor network platform, the usage information at least including at least one of ventilation efficiency of the filter element, filtered impurity information, and a blockage degree; obtaining, by a smart gas pipeline network device management sub-platform, the usage information from the smart gas data center, determining a filter element maintenance plan based on the usage information, and sending the filter element maintenance plan to the smart gas data center; and sending, by the smart gas data center, the filter element maintenance plan to a smart gas user platform through a smart gas service platform.

Abstract: A method for detecting a dioxin emission concentration of a municipal solid waste incineration process based on multi-level feature selection. A grate furnace-based MSWI process is divided into a plurality of sub-processes. A correlation coefficient value, a mutual information value and a comprehensive evaluation value between each of original input features of the sub-processes and the DXN emission concentration are obtained, thereby obtaining first-level features. The first-level features are selected and statistically processed by adopting a GAPLS-based feature selection algorithm and according to redundancy between different features, thereby obtaining second-level features. Third-level features are obtained according to the first-level features and statistical results of the second-level features. A PLS algorithm-based DXN detection model is established based on model prediction performance and the third-level features.

Abstract: A ship cabin loading capacity measurement method and apparatus thereof, comprises: acquiring point cloud measurement data of a ship cabin; optimizing the point cloud measurement data according to a predetermined point cloud data processing rule, and generating optimized ship cabin point cloud data; calculating said ship cabin point cloud data with a predetermined loading capacity calculation rule, and getting ship cabin loading capacity data. According to the ship cabin loading capacity measurement method of the present invention, the point cloud measurement data can be acquired by a lidar, and processing the point cloud measurement data of the ship cabin with a predetermined point cloud data processing law and a computation law, and as the point cloud data processing law and the computation law can be deployed in a computer device in advance, after point cloud measurement data acquisition, loading capacity of a ship cabin can be acquired quickly and precisely.

Abstract: A geological exploration method starts by obtaining measurements and calculating properties along boreholes in an area of interest to generate log data including plural curves. Anomalies are detected along at least one curve of one of the boreholes. A machine learning regressor is trained using one or more curves without anomaly values of the one of the boreholes and/or of another similar borehole among the boreholes, to predict a synthetic curve corresponding to the at least one curve. The synthetic curve is then blended into the at least one curve.

Abstract: The reliability of calculated bio-information of a subject is determined. When the reliability of the bio-information is determined to be high, the bio-information is output, whereas when the reliability of the bio-information is determined to be low, the bio-information is not output. Thus, among the calculated bio-information, only the bio-information of high reliability may be output, or distinctive display may be performed depending on the reliability, whereby it is possible to provide a bio-information output device and the like capable of easily determining bio-information of high reliability.

Abstract: Methods and systems for wellbore path planning are disclosed. The method includes defining total depth coordinates of a candidate wellbore path within a hydrocarbon reservoir, obtaining geoscience data for a subterranean region enclosing the hydrocarbon reservoir, and obtaining historical drilling data from an offset well in the subterranean region. The method further includes training a machine learning network to predict drilling hazard probabilities along the candidate wellbore path using the geoscience data and the historical drilling data. The method still further includes determining a first wellbore path to terminate at the total depth coordinates using the candidate wellbore path and the trained machine learning network.

Abstract: A vibration dose measurement apparatus 10 for an operator's hand 1 comprises a sensing assembly 20 connected to a control unit 25. The sensing assembly 20 comprises an accelerometer 21, gyroscope 22, and gripping force sensor 23 and may be packaged within a protective housing (not shown). By monitoring output of the sensor assembly 20, the vibration dose experienced by the hand 1 can be estimated. In the present invention, the provision of gripping force sensor 23 allows for vibration dose measurement to be adjusted based on the output of gripping force sensor 23. This can therefore take into account the force applied by an operator in gripping machinery, which can impact significantly on the effective vibration dose.

Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A three-dimensional data creation method for use in a vehicle including a sensor and a data receiver that transmits and receives three-dimensional data to and from an external device. The three-dimensional data creation method includes: creating second three-dimensional data based on information detected by the sensor and first three-dimensional data received by the data receiver; and transmitting, to the external device, third three-dimensional data that is part of the second three-dimensional data.

Abstract: A three-dimensional electrical resistivity tomography method and system belonging to the field of geological geophysical prospecting, the method including the steps of prospecting a region containing a geological anomaly with at least two prospecting modes respectively to acquire two-dimensional resistivity data of a corresponding detection plane; unifying coordinate systems of resistivity data points acquired in all prospecting modes, and extracting data points with the same coordinates; carrying out data fusion on extracted resistivity data at the same position by utilizing a principal component analysis method; and carrying out three-dimensional coordinate conversion on resistivity data acquired after fusion to form a three-dimensional model.

Abstract: Device for checking the integrity of a digital transmission for an analog output of a system. The analog output may be checked for transient errors that can be attributed to a digital transmission path embedded somewhere within the vehicle system. A test signal is introduced into a digital transmission that can be reassembled from an analog path of the analog output, and, if not, allows the test device to pinpoint that errors are appearing due to the digital path, and not because of the analog output. In this way, debugging an installation of a system becomes easier; obtaining confidence in reliability of a mixed analog and digital system becomes less of a challenge and less time consuming.

Abstract: Methods and apparatus are provided for automatically adjusting, by an audio device, the SPL of its audio output. As described herein, the SPL is adjusted based on detected ambient noise. According to aspects, audio device iteratively adjusts the SPL based on the ambient noise. According to aspects, the SPL is adjusted to be greater than the ambient noise by a threshold SPL amount. According to aspects, the audio device outputs sound in substantially a first direction and the microphone detects sound substantially outside of the first direction. The adjusted sounds are output by the audio device.