Abstract: A vertical channel transistor includes a first source/drain electrode; a second source/drain electrode spaced apart from the first source/drain electrode in a first direction; a first channel pattern between the first source/drain electrode and the second source/drain electrode; a first gate electrode on a side surface of the first channel pattern; a first gate insulation layer between the first channel pattern and the first gate electrode; and a first graphene insertion layer between the first source/drain electrode and the first channel pattern.

Abstract: A method for manufacturing a semiconductor device includes forming one or more work function layers over a semiconductor structure. The method includes forming a hardmask layer over the one or more work function layers. The method includes forming an adhesion layer over the hardmask layer. The method includes removing a first portion of a patternable layer that is disposed over the hardmask layer. The adhesion layer comprises an organic acid that concurrently bonds metal atoms of the hardmask layer and phenol groups of the patternable layer, thereby preventing an etchant from penetrating into a second portion of the patternable layer that still remains over the hardmask layer.

Abstract: Provided is a semiconductor apparatus comprising: a semiconductor substrate; an element electrode provided above the semiconductor substrate; an element electrode pad electrically connected to the element electrode; and a wire configured to connect to the element electrode pad at a plurality of connection points, wherein the semiconductor substrate includes an emitter region of a first conductivity type arrayed in an array direction, the emitter region facing the element electrode on an upper surface of the semiconductor substrate, wherein a density of the emitter region below a connection point of any of the wires is different from a density of the emitter region below a connection point of any other of the wires.

Abstract: The structure of a semiconductor device with an array of bioFET sensors, a biometric fingerprint sensor, and a temperature sensor and a method of fabricating the semiconductor device are disclosed. A method for fabricating the semiconductor device includes forming a gate electrode on a first side of a semiconductor substrate, forming a channel region between source and drain regions within the semiconductor substrate, and forming a piezoelectric sensor region on a second side of the semiconductor substrate. The second side is substantially parallel and opposite to the first side. The method further includes forming a temperature sensing electrode on the second side during the forming of the piezoelectric sensor region, forming a sensing well on the channel region, and binding capture reagents on the sensing well.

Abstract: A semiconductor device includes a first vertical field-effect transistor comprising a first set of vertical fins and a second set of vertical fins separated by a first isolation pillar structure. The semiconductor device further includes a second vertical field-effect transistor adjacent to the first vertical field-effect transistor, the second vertical field-effect transistor comprising a first set of vertical fins and a second set of vertical fins separated by a second isolation pillar structure.

Abstract: A semiconductor device may comprise: a plurality of lower electrodes which are on a substrate; a first electrode support which is between adjacent lower electrodes and comprises a metallic material; a dielectric layer which is on the lower electrodes and the first electrode support to extend along profiles of the first electrode support and each of the lower electrodes; and an upper electrode which is on the dielectric layer.

Abstract: A semiconductor device is proposed. An example of the semiconductor device includes a semiconductor body having a first main surface. A trench structure extends into the semiconductor body from the first main surface. The trench structure includes a trench electrode structure and a trench dielectric structure. The trench dielectric structure includes a gate dielectric in an upper part of the trench dielectric structure and a gap in a lower part of the trench dielectric structure. The semiconductor device further includes a body region adjoining the gate dielectric at a sidewall of the trench structure in the upper part of the trench dielectric structure. The gate dielectric extends deeper into the semiconductor body along the sidewall than the body region.

Abstract: Improved bonding surfaces for microelectronics are provided. An example method of protecting a dielectric surface for direct bonding during a microelectronics fabrication process includes overfilling cavities and trenches in the dielectric surface with a temporary filler that has an approximately equal chemical and mechanical resistance to a chemical-mechanical planarization (CMP) process as the dielectric bonding surface. The CMP process is applied to the temporary filler to flatten the temporary filler down to the dielectric bonding surface. The temporary filler is then removed with an etchant that is selective to the temporary filler, but nonreactive toward the dielectric surface and toward inner surfaces of the cavities and trenches in the dielectric bonding surface. Edges of the cavities remain sharp, which minimizes oxide artifacts, strengthens the direct bond, and reduces the bonding seam.

Abstract: A display device includes a base substrate which is flexible, first and second active patterns disposed on the base substrate, an inorganic insulating layer disposed on the first and second active patterns and defining an opening area, a first organic insulating pattern disposed inside the opening area, a bridge electrode disposed on the first organic insulating pattern, a second organic insulating layer disposed on the bridge electrode, a fourth organic insulating layer disposed on the second organic insulating layer, first and second pixel electrodes disposed on the fourth organic insulating layer and electrically connected to the first and second active patterns, respectively, and a third organic insulating pattern disposed between the second organic insulating layer and the fourth organic insulating layer, overlapping the second pixel electrode, and not overlapping the first pixel electrode.

Abstract: A semiconductor device includes conductive pillars on a semiconductor substrate, a first support pattern that contacts first portions of lateral surfaces of the conductive pillars and connects the conductive pillars to each other, the first support pattern including first support holes that expose second portions of the lateral surfaces of the conductive pillars, a capping conductive pattern that contacts the second portions of the lateral surfaces of the conductive pillars and exposes the first support pattern, the second portions of the lateral surfaces of the conductive pillars being in no contact with the first support pattern, and a dielectric layer that covers the first support pattern and the capping conductive pattern, the dielectric layer being spaced apart from the conductive pillars.

Abstract: A semiconductor memory device may include a stack including word lines and interlayer insulating patterns alternatingly stacked on a substrate, the word lines being extended in a first direction parallel to a top surface of the substrate, semiconductor patterns crossing the word lines and having a long axis extended in a second direction parallel to the top surface of the substrate, data storage patterns respectively interposed between the semiconductor patterns and the word lines, the data storage patterns including a ferroelectric material, bit lines extended in a third direction perpendicular to the top surface of the substrate and spaced apart from each other in the first direction, each of the bit lines being in contact with first side surfaces of the semiconductor patterns spaced apart from each other in the third direction, and a source line in contact with second side surfaces of the semiconductor patterns.

Abstract: The present disclosure describes a semiconductor device includes a first fin structure, an isolation structure in contact with a top surface of the first fin structure, a substrate layer in contact with the isolation structure, an epitaxial layer in contact with the isolation structure and the substrate layer, and a second fin structure above the first fin structure and in contact with the epitaxial layer.

Abstract: A semiconductor device includes: a first stacked structure including a first lower dielectric layer, a first horizontal gate structure, and a first upper dielectric layer stacked vertically; a second stacked structure including a second lower dielectric layer, a second horizontal gate structure, and a second upper dielectric layer stacked vertically, and having a first side facing a first side of the first stacked structure; a first channel layer formed on the first side of the first stacked structure; a second channel layer formed on the first side of the second stacked structure; a lower electrode layer commonly coupled to lower ends of the first and second channel layers between the first and second stacked structures; a first upper electrode layer coupled to an upper end of the first channel layer; and a second upper electrode layer coupled to an upper end of the second channel layer.

Abstract: According to one embodiment, a semiconductor memory device includes a first stacked body including a first insulating film and a first conductive film alternately stacked in a first direction. A plurality of first columnar bodies extend in a first stacked body in the first direction and include a first semiconductor portion. A second insulating film is disposed on the first stacked body and includes a material different from that of the first insulating film. The first insulating portion is disposed on the second insulating film. When a second direction is a direction in which a first film extends in a plane that intersects the first direction, the first film penetrates the second insulating film in the first direction and extends in the second direction.

Abstract: A semiconductor device and a method of manufacturing a semiconductor are provided. In an embodiment, a method of manufacturing a semiconductor device is provided. A first surface of a metal silicide layer may be treated with an oxidizing agent to oxidize metal silicide protrusions on the first surface of the metal silicide layer. After treating the first surface with the oxidizing agent, the first surface may be treated with a cleaning agent to remove oxide over the metal silicide protrusions, wherein a size of a metal silicide protrusion of the metal silicide protrusions after treating the first surface with the cleaning agent is smaller than a size of the metal silicide protrusion prior to treating the first surface with the oxidizing agent.

Abstract: An integrated circuit device may be formed including an electronic substrate and a metallization structure on the electronic substrate, wherein the metallization structure includes a first level comprising a first dielectric material layer, a second level on the first level, wherein the second level comprises a second dielectric material layer, a third level on the second level, wherein the third level comprises a third dielectric material layer, at least one power/ground structure in the second level, and at least one skip level via extending at least partially through the first dielectric material layer of the first level, through the second dielectric layer of the second level, and at least partially through the third dielectric material layer of the third level, wherein the at least one skip level via comprises a continuous conductive material.

Abstract: An array substrate and a display panel are provided. A driving circuit layer of the array substrate includes a low temperature polysilicon thin film transistor and a low temperature polycrystalline oxide thin film transistor which are electrically connected with each other. A hydrogen blocking layer is formed on at least one of an upper side and a lower side of an oxide active layer of the low temperature polysilicon thin film transistor. The hydrogen blocking layer can block hydrogen ions in other film layers to invade the oxide active layer and avoid that device characteristics are drifted.

Abstract: A semiconductor device includes: a second electrode, located in a semiconductor part, extending in a first direction; a third electrode, located in the semiconductor part, including a first portion, a second portion, and a first middle portion positioned below the second electrode between the first portion and the second portion, the second electrode being located between the first portion and the second portion in the first direction; a fourth electrode, located above the semiconductor part, including a pad portion separated from the second electrode and the second portion in a second direction, and a protrusion protruding from the pad portion and covering the second electrode and being connected to the second electrode; and a fifth electrode, located above the semiconductor part, including a first covering portion being connected to the first contact portion and a second covering portion being connected to the first portion.

Abstract: In an embodiment, a structure includes: a nano-structure; an epitaxial source/drain region adjacent the nano-structure; a gate dielectric wrapped around the nano-structure; a gate electrode over the gate dielectric, the gate electrode having an upper portion and a lower portion, a first width of the upper portion increasing continually in a first direction extending away from a top surface of the nano-structure, a second width of the lower portion being constant along the first direction; and a gate spacer between the gate dielectric and the epitaxial source/drain region.

Abstract: A semiconductor device includes a first active region and a second active region arranged along a first direction in a substrate, an element isolation layer extending in a second direction in the substrate to isolate the first active region and the second active region, a first gate electrode extending in the first direction on the first active region, a second gate electrode extending in the first direction on the second active region, and an isolation impurity region containing impurities of a first conductivity type in the substrate and disposed below the element isolation layer, in which the isolation impurity region includes a first isolation region and a second isolation region spaced apart from each other in the second direction, and at least a part of the substrate interposed between the first gate electrode and the second gate electrode is interposed between the first isolation region and the second isolation region.