Abstract: The mechanism comprises a magnetically coupled drive mechanism for transporting semiconductor wafers in a semiconductor wafer processing system. The mechanism includes an actuator within a cylinder that contains a set of magnets that drive a complementary set of magnets inside a carriage along a linear path. The carriage is limited to linear motion via a linear ball slide. The magnets in the actuator and carriage are magnetically coupled in such a way as to prevent angular rotation of the magnets within the actuator. Accordingly, driving elements in the actuator can be moved via rotation of a ball screw shaft coupled to a ball nut affixed to the actuator magnets.
Type:
Grant
Filed:
June 21, 2001
Date of Patent:
March 30, 2004
Assignee:
Novellus Systems, Inc.
Inventors:
Thomas M. Pratt, Scott Douglas McClelland, Craig L. Stevens, Kerry Hopkins