Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.
Abstract: An electrostatic charge image developing toner includes: a toner particle containing a binder resin; and an external additive containing alumina particles having a volume average particle diameter of more than 5 nm and 80 nm or less and silica particles having a volume average particle diameter of 10 nm or more and 90 nm or less, and in the toner particle, a Net intensity NA of a total of an alkali metal element and an alkaline earth metal element, measured by fluorescence X-ray analysis, is 0.10 kcps or more and 1.30 kcps or less, and a ratio (Ws/Wa) of a content Ws of the silica particles to a content Wa of the alumina particles is more than 0.5 and less than 35.
Abstract: The peak top molecular weight of the tetrahydrofuran-soluble component of the toner, as measured by gel permeation chromatography, is 4,000 or more and 6,500 or less. The tetrahydrofuran-insoluble component of the toner is 10% by weight or more and 30% by weight or less. When the endothermic peak temperature T1 in the heating process and the exothermic peak temperature T2 during the cooling process originating from the ester wax is measured using a differential scanning calorimeter, the value T1-T2 is 15° C. or more and 30° C. or less.
Abstract: The invention relates to a toner for development of electrostatic images excellent in fusing property on polypropylene films and excellent in rubfastness of printed images, and a resin composition for a toner for development of electrostatic images.
Abstract: A mask for use in a semiconductor lithography process includes a substrate, a mask pattern disposed on the substrate, and a light absorbing border surrounding the mask pattern. The light absorbing border is inset from at least two edges of the substrate to define a peripheral region outside of the light absorbing border. In some designs, a first peripheral region extends from an outer perimeter of the light absorbing border to a first edge of the substrate, and a second peripheral region that extends from the outer perimeter of the light absorbing border to a second edge of the substrate, where the first edge of the substrate and the second edge of the substrate are on opposite sides of the mask pattern.
Abstract: A toner comprising a toner particle, wherein the toner particle includes a toner base particle containing a binder resin and includes a protruded portion on a surface of the toner base particle; the protruded portion comprises an organosilicon polymer and a polyhydric acid metal salt; and the polyhydric acid metal salt is present on a surface of the protruded portion.
Abstract: The invention relates to a method for measuring a photomask for semiconductor lithography, including the following steps: recording an aerial image of at least one region of the photomask, defining at least one region of interest, ascertaining structure edges in at least one region of interest, providing desired structures to be produced by the photomask, adapting the ascertained structure edges to the desired structures, and displacing the adapted structure edges by means of the results of a separate registration measurement.
Abstract: A method for producing a toner for electrostatic charge image development includes: aggregating binder resin particles in a dispersion containing the binder resin particles to form aggregated particles; terminating growth of the aggregated particles by adding an alkaline aqueous solution to a dispersion containing the aggregated particles to increase a pH of the dispersion containing the aggregated particles; and fusing and coalescing the aggregated particles into toner particles by heating the dispersion containing the aggregated particles. Terminating the growth of the aggregated particles includes, while stirring the dispersion containing the aggregated particles, stepwise or continuously reducing a stirring power per unit volume.
Abstract: Provided are a binder resin composition for toner excellent in low-temperature fusing property, storage stability and durability, a toner for developing electrostatic images that contains the binder resin composition for toner, and a method for producing the binder resin composition for toner. The binder resin composition for toner contains a resin composition (C-P) prepared by condensing an acid group-having crystalline resin (C) and a polyalkyleneimine, and an amorphous resin (A).
Abstract: Provided is an electrostatic charge image developing toner including toner matrix particles containing at least a binder resin, wherein a photosensitizer having a singlet oxygen generating ability is contained inside the toner matrix particles or in an external additive attached to the toner matrix particles.
Abstract: A toner includes toner particles. The toner particles each include a toner mother particle and an external additive attached to the surface of the toner mother particle. The external additive includes specific external additive particles. The specific external additive particles have a number average primary particle diameter of at least 30 nm and no greater than 305 nm. The specific external additive particles include antimony-doped tin oxide particles or indium tin oxide particles. A ratio (MSb/(MSn+MSb)) of a mass (MSb) of an antimony atom to a total of the mass (MSb) of the antimony atom and a mass (MSn) of a tin atom in the antimony-doped tin oxide particles is at least 0.04 and no greater than 0.46.
Abstract: A pale-color toner includes toner particles. The toner particles each include a toner mother particle and an external additive attached to a surface of the toner mother particle. The external additive includes specific external additive particles. The specific external additive particles have a number average primary particle diameter of at least 30 nm and no greater than 305 nm. The specific external additive particles include antimony-doped tin oxide particles. A ratio (MSb/(MSn+MSb)) of a mass (MSb) of an antimony atom to a total of the mass (MSb) of the antimony atom and a mass (MSn) of a tin atom in the antimony-doped tin oxide particles is at least 0.04 and no greater than 0.31.
Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate, a multilayer stack of reflective layers on the substrate, a capping layer on the multilayer stack of reflecting layers, and an absorber on the capping layer. The absorber comprises a first layer selected from the group consisting of Mo, Nb, V, alloys of Mo, Nb and V, oxides of Mo, oxides of Nb, oxides of V, nitrides of Mo, nitrides of Nb and nitrides of V and a second layer selected from the group consisting of TaSb, CSb, SbN, TaNi, TaCu and TaRu.
Abstract: A toner set includes a plurality of toners, wherein the toner set includes a first toner containing a yellow colorant and a second toner containing a cyan colorant, the first toner and the second toner each contain a binder resin containing a vinyl-based resin and a crystalline resin, and a release agent containing a hydrocarbon wax, a content of the vinyl-based resin with respect to a total mass of the binder resin is 50% by mass or more, the first toner contains the crystalline resin having a moiety having a crystal structure and a crystal nucleating agent moiety having a crystal nucleating agent, and the second toner contains the cyan colorant that is a compound represented by general formula (1).
Abstract: An electrophotographic photoconductor includes: a conductive substrate; and a single-layer-type photoconductive layer that is provided on the conductive substrate, contains a binder resin, a charge generating material, a hole transporting material, and an electron transporting material, and has an index A represented by the following equation (1) in a range of ?7.98 or more and ?7.28 or less, Equation (1): A=(0.057×M)?(0.002×F)?(0.252×?), in which, in the equation (1), M represents a Martens hardness of the single-layer-type photoconductive layer, F represents a Young's modulus of the single-layer-type photoconductive layer, and ? represents an elastic deformation ratio of the single-layer-type photoconductive layer.
Abstract: A mask includes a first light-transmitting portion. The first light-transmitting portion includes a target region and at least one compensation region connected to the target region. A planar pattern of the target region includes a plurality of corners, and a planar pattern of each compensation region extends from one of the plurality of corners. An area of the planar pattern of each compensation region is less than an area of the planar pattern of the target region.
Abstract: A toner comprising: a toner particle containing a resin component and a wax; and an inorganic fine particle on the surface of the toner particle, wherein, in a cross section of the toner particle, domains containing the wax are observed, and when among the domains, domains having a major diameter of 10-300 nm are defined as domains S, an occupation area percentage of which a ratio of a total sum of areas occupied by the domains S in a region from a surface of the toner particle to a depth of 600 nm in the cross section with respect to an area of the region, is 3.0-15.0%, and wherein the inorganic fine particle contains a fine particle A having a volume resistivity of 1.0×103 to 3.0×105 ?·cm, and having a relative permittivity ?r of 100 or more.
Abstract: An electrophotographic photosensitive member including a support, an intermediate layer, and a photosensitive layer in this order, wherein the intermediate layer comprises a tungsten oxide particle, and the tungsten oxide particle contains a tungsten atom, an oxygen atom, and a cesium atom.
Abstract: A cyan toner is provided. The cyan toner comprises toner particles each comprising a binder resin and a colorant. From 1.0% to 20.0% by number of the toner particles have a CH rate of 7.0% or more in absolute value. The CH rate is calculated from the following formula (1): CH rate (%)=[(In?Iave)/Iave]×100??Formula (1) where, in a Raman spectrum of each toner particle, In represents an integrated intensity within a wavenumber region of from 2,600 to 3,180 cm?1 when an intensity at a wavenumber ? within a wavenumber region of from 2,600 to 2,800 cm?1 is s normalized to 1, where a total intensity of all the toner particles is maximum at the wavenumber ?; and Iave represents an average of the In.
Abstract: A toner comprising a toner particle and an external additive, wherein the external additive comprises a composite particle comprising an organosilicon polymer fine particle covering a surface of an alumina particle, a coverage ratio of the surface of the alumina particle with the organosilicon polymer fine particle is 1 to 50 area %, and given A (nm) as a number-average particle diameter of primary particles of the organosilicon polymer fine particle and B (nm) as a number-average particle diameter of primary particles of the alumina particle, following formulae (I) and (II) are satisfied: A?90??(I) 100?B?1000??(II).