Abstract: In an interferometer for detecting interference light between light flux passed through an object to be inspected and reference light to be generated from a portion of the light flux passed therethrough, a phase of the interference light is detected with high precision. The light flux passed through the optical system to be inspected forms a spot image on a pinhole formed in a plate. Measuring light from the spot image and the reference-light diffracted out of the light flux from the spot image at the pinhole create interference light which in turn is received by an observation system. An image of interference fringes formed by the interference light is taken with an image pickup element. Further, heterodyne interference light is created by vibrating the plate in the direction intersecting the light flux or in the direction along the light path of the light flux, thereby detecting a phase of each portion of the interference fringes with high precision.

Abstract: An optical displacement measurement system that can detect the position of an object with an enhanced degree of resolution, wherein a coherent beam La is focussed on the lattice plane of a diffraction grating and, at the same time, a diffracted beam Lb is focussed on the light receiving plane of a light receiving means 3. The length of the optical path of any diffracted laser beam that passes through the aperture of a second focussing means 5 remains invariable. Therefore, if the optical axis of the diffracted beam Lb is deviated, the spot where it is focussed on the light receiving plane of the light receiving means 3 is not shifted and hence the length of the optical path will not change. Two diffracted laser beams having in equal length of optical path are made to interfere with each other in order to detect the phase difference. The displaced postion of the diffraction grating coherent beam La1 is then measured on the basis of the phase difference.

Abstract: A method and apparatus for measuring the flying height of a slider above a disk surface and in-situ monitoring the slider disk interface comprising the steps of: providing a beam of light; providing a slider disk interface comprising a disk having a substantially transparent substrate and a thin film layer, a slider for carrying a read/write element, the slider having a reflective surface; and an air bearing having a thickness d3 for supporting the slider above the disk; directing the beam of light to the slider disk interface through the disk, the thin film layer, the air bearing and then to the reflective surface of the slider; and measuring one of the intensity and phase information of the light reflected from the slider disk interface to provide an indication of the thickness d3 of the air bearing and/or of the thin film layer.

Abstract: All-optical bit phase sensors that utilize nonlinear interferometers are described. An all-optical bit phase sensor that utilizes an optical fiber and a detector optically coupled to the core of the fiber, perpendicular to the longitudinal direction of the core, is described. In addition, an electrooptic bit phase sensor that utilizes a semiconductor diode and an electrical detector electrically coupled to the active layer is described. Electrooptical and all-optical phase lock loops, optical processors, and optical networks that utilize these bit phase sensing are also described.

Abstract: An optical probe apparatus for determining a position of an image sensor in a digital camera relative to a reference surface on the digital camera. The optical probe assembly includes a probe mounting surface adapted to be removably mountable to the digital camera and lockable in a predetermined orientation relative to the reference surface of the digital camera; an angle cleaved optical fiber emitting a beam of light; a lens disposed in the path of the beam of light and directing the beam of light along an axis normal to a plane of the lens toward the object; and a mounting member supporting the optical fiber such that the beam of light is directed along an axis normal to the plane of the lens and directed to the center of the lens. An optically transparent material (such as a pellicle or glass plate) is disposed intermediate the probe mounting surface and image sensor.

Abstract: The method utilizes the physical phenomenon known as dispersion of the optical rotation. After passage of linearly polarized electromagnetic radiation through the optically active environment (rotator), with the rotating power characterized by a parameter p, and then through the analyzing polarizer, the function R(p) can be measured. For the given active medium and the relative orientation of polarization planes of the input light beam and the analyzing polarizer, R(p) has an unambiguous relation with the spectrum I(&lgr;) of the analyzed radiation (&lgr; stands for wavelength) and allows its unambiguous determination by special mathematical methods. In devices based on the above mentioned principle a linearly polarized collimated beam of analyzed radiation propagates through the optical rotator then passes through the analyzer and strikes a single-channel or multi-channel detector which measures R(p) as a function of the parameter p.

Abstract: A first double pass etalon based spectrometer. In a preferred embodiment a second etalon matched to the first double pass etalon is used to produce extremely precise fringe data. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A retroreflector reflects the transmitted components back through the etalon. Twice transmitted spectral components are directed through a second etalon and focused onto a light detector which in a preferred embodiment is a photo diode array. The spectrometer is very compact producing the extremely precise fringe data permitting bandwidth measurements with precision needed for microlithography for both &Dgr;&lgr;FWHM and &Dgr;&lgr;95%.

Abstract: An apparatus is disclosed for generating data representative of a three-dimensional distribution of the light backscattering potential of a transparent or semi-transparent object such as a human eye. The apparatus includes an interferometer, both the reference beam and measurement beam of which are directed toward the object and reflected by respective reference and measurement sites thereof, such that axial motion of the object during measurement affects both beams equally. The measurement beam is raster scanned transversely across each measurement site for which data is obtained. Also, the frequency of one of the beams is shifted by a non-moving frequency shifter, such that the reflected beams combine and are modulated by a heterodyne beat frequency, which is detected when the object path difference is matched with the interferometer path difference.

Abstract: A fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement is provided. A fiber Fabry-Perot interferometer diaphragm sensor (12a, 12b, 12c) includes a base (54a, 54b, 54c) and a diaphragm (52a, 52b, 52c) with an optic fiber (30) coupled under tension between the base (54a, 54b, 54c) and the diaphragm (52a, 52b, 52c). A fiber Fabry-Perot interferometer element (40) is contained within the optic fiber (30) and operates to sense movement of the diaphragm (52a, 52b, 52c). In a particular embodiment, the diaphragm (52a) moves in response to a pressure (P) applied to the diaphragm (52a). In another embodiment, a proof mass (72) is coupled to the diaphragm (52b) such that the diaphragm (52b) moves in response to an acceleration (A). In yet another embodiment, a magnetic body (80) is coupled to the diaphragm (52c) such that the diaphragm (52c) moves in response to a magnetic field (M).

Abstract: An optical heterodyne wavefront sensor uses a radio frequency (RF) signal for measuring an optical wavefront having a state of phase that differs throughout its aperture. It comprises a lens, optical fiber and optical frequency shifter arrangement to develop a reference optical wavefront having substantially the same phase throughout and that is shifted in frequency by an amount corresponding to the RF. A beam combiner interferometrically combines the optical wavefront and the shifted reference optical wavefront into a heterodyne optical signal at the RF frequency, each subaperture of which has a phase that corresponds to the state of phase of a like subaperture of the optical wavefront.

Abstract: An optical displacement measurement system can detect a position of an object with an enhanced degree of resolution by providing, a coherent beam La is focussed on the lattice plane of a diffraction grating 1 by a first focussing element 4 and, at the same time, a first pair of diffracted beam Lb1, Lb2 are collimated and made to irradiate a reflection optical system 3 perpendicularly by a second focussing element 5. Thus, if the optical axis of the first diffracted beam Lb1 is displaced, the first diffracted beam Lb1 follows the same optical path and focussed on the lattice plane of the diffraction grating at the same spot when reflected by the reflection optical system so that the optical axis of the second diffracted beam Lb2 produced from the first diffracted beam Lb1 as the latter is diffracted will never be displaced.