Patents Examined by Pratiksha Jayant Lohakare
  • Patent number: 11985904
    Abstract: A method of manufacturing a semiconductor device includes: providing a substrate, the substrate defining a logic region and a memory region; depositing a bottom electrode layer across the logic region and the memory region; depositing a magnetic tunnel junction (MTJ) layer over the bottom electrode layer; depositing a first conductive layer over the MTJ layer; depositing a sacrificial layer over the first conductive layer; etching the sacrificial layer in the memory region to expose the first conductive layer in the memory region while keeping the first conductive layer in the logic region covered; depositing a second conductive layer in the memory region and the logic region; patterning the second conductive layer to expose the MTJ layer in the memory region; and etching the patterned second conductive layer and the MTJ layer to form a top electrode and an MTJ, respectively, in the memory region.
    Type: Grant
    Filed: February 5, 2021
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Jen Chien, Jung-Tang Wu, Szu-Hua Wu, Chin-Szu Lee, Meng-Yu Wu
  • Patent number: 11929405
    Abstract: In an embodiment, a Group III nitride-based transistor device includes a source electrode, a drain electrode and a gate electrode positioned on a first major surface of a Group III nitride based-based layer, wherein the gate electrode is laterally arranged between the source electrode and the drain electrode, a passivation layer arranged on the first major surface and a field plate coupled to the source electrode, the field plate having a lower surface arranged on the passivation layer. The field plate is laterally arranged between and laterally spaced apart from the gate electrode and the drain electrode.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: March 12, 2024
    Assignee: Infineon Technologies AG
    Inventors: Albert Birner, Helmut Brech, John Twynam
  • Patent number: 11908747
    Abstract: A method of processing a substrate includes forming a first layer stack on a substrate, the first layer stack including conductive layers and dielectric layers that alternate in the first layer stack. An opening is formed in the first layer stack, the opening extending through each of the conductive layers in the first layer stack such that sidewalls of each of the conductive layers are exposed within the opening. A second stack of layers is formed within the opening, the second stack of layers including channel layers of semiconductor material positioned in the second stack such that each channel layer contacts exposed sidewalls of a respective conductive layer of the first layer stack. Transistor channels are from the channel layers of the second stack such that each transistor channel extends between exposed sidewalls of a respective conductive layer within the opening.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: February 20, 2024
    Assignee: Tokyo Electron Limited
    Inventors: Mark I. Gardner, H. Jim Fulford
  • Patent number: 11887993
    Abstract: The present disclosure is drawn to thin-film transistors, electronic displays that include thin-film transistors, and methods of making thin-film transistors. In one example, a thin-film transistor can include a nonconductive substrate, a semiconductor layer on the nonconductive substrate, a source electrode adjacent a first side of the semiconductor layer and partially overlapping a first peripheral portion of the semiconductor layer, a drain electrode adjacent a second side of the semiconductor layer and partially overlapping a second peripheral portion of the semiconductor layer, an etch stop layer on the semiconductor layer, a gat insulator layer on the etch stop layer, and a gate electrode on the gate insulator layer. The source electrode and the drain electrode do not overlap the etch stop layer.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: January 30, 2024
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Hsing-Hung Hsieh, Kuan-Ting Wu, Super Liao
  • Patent number: 11877446
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, memory openings vertically extending through the alternating stack, and memory opening fill structures located within the memory openings. Each of the electrically conductive layers includes a metallic fill material layer and a plurality of vertical tubular metallic liners laterally surrounding a respective one of the memory opening fill structures and located between the metallic fill material layer and a respective one of the memory opening fill structures. The tubular metallic liners may be formed by selective metal or metal oxide deposition, or by conversion of surface portions of the metallic fill material layers into metallic compound material portions by nitridation, oxidation, or incorporation of boron atoms.
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: January 16, 2024
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Rahul Sharangpani, Raghuveer S. Makala, Fei Zhou, Adarsh Rajashekhar
  • Patent number: 11848342
    Abstract: An image sensor includes: a substrate having a first surface and a second surface that are opposite to each other; a plurality of color filters on the substrate; a fence pattern between adjacent color filters of the plurality of color filters; and a protective layer between the substrate and the plurality of color filters, wherein the protective layer covers the fence pattern. The fence pattern includes: a first fence pattern having a first bottom surface and a first top surface that are opposite to each other; and a second fence pattern on the first top surface of the first fence pattern. A width at the first bottom surface of the first fence pattern is less than a width of the second fence pattern, and the protective layer covers a sidewall of the first fence pattern.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: December 19, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sunyoung Bang, Seungjoo Nah, Hoemin Jeong, Heegeun Jeong
  • Patent number: 11837615
    Abstract: An image sensor may include a substrate having first and second surfaces opposite to each other and including unit pixel regions and impurity regions near the first surface, a device isolation pattern provided on the first surface to define the impurity regions, and an interconnection layer including an insulating layer covering the first surface of the substrate, interconnection lines on the insulating layer, and a penetration structure penetrating the insulating layer. The penetration structure may include a first pattern connected to one of the impurity regions and in contact with at least a portion of the device isolation pattern, a second pattern provided on the first pattern and in contact with the interconnection lines, and a third pattern provided between the first and second patterns. A top surface of the first pattern may be higher than that of the device isolation pattern.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: December 5, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Taeyoung Song, Sung In Kim, Kwansik Cho
  • Patent number: 11837621
    Abstract: An image sensor including a substrate having first and second surfaces that are opposite to each other. The substrate includes unit pixel regions having photoelectric conversion regions. A semiconductor pattern is disposed in a first trench defined in the substrate and defines the unit pixel regions. The semiconductor pattern includes a first semiconductor pattern and a second semiconductor pattern disposed on the first semiconductor pattern. A back-side insulating layer covers the second surface of the substrate. The first semiconductor pattern includes a side portion extended along an inner side surface of the first trench and a bottom portion connected to the side portion and disposed closer to the second surface of the substrate than the side portion. The second semiconductor pattern extends toward the second surface of the substrate and is spaced apart from the back-side insulating layer with the bottom portion of the first semiconductor pattern interposed therebetween.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: December 5, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kook Tae Kim, Ju-Eun Kim, Miseon Park, Jaewoong Lee, Soojin Hong
  • Patent number: 11758724
    Abstract: A memory device includes a substrate, a laminated structure and a memory string. The laminated structure is disposed on the substrate. The laminated structure includes a plurality of insulating layers and a plurality of conductive layers alternately stacked along a first direction. The memory string is accommodated in the laminated structure along the first direction. The memory string includes a memory layer and a channel layer, and the memory layer is disposed between the laminated structure and the channel layer. At least a portion of the memory layer and the insulating layers are overlapped along the first direction.
    Type: Grant
    Filed: February 4, 2021
    Date of Patent: September 12, 2023
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Guan-Wei Wu, Yao-Wen Chang, I-Chen Yang
  • Patent number: 11758717
    Abstract: A semiconductor die comprises: a first semiconductor device and a second semiconductor device. The first semiconductor device comprises a first device portion comprising a first sub-array of memory devices, and a first interface portion located adjacent to the first device portion in a first direction. The first interface portion has a staircase profile in a vertical direction. The second semiconductor device comprises a second device portion adjacent to the first device portion in the first direction opposite the first interface portion. The second device portion comprises a second sub-array of memory devices, and a second interface portion located adjacent to the first device portion in the first direction opposite the first interface portion. The second interface portion also has a staircase profile in the vertical direction. The first semiconductor device is electrically isolated from the second semiconductor device.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Han Lin, Chia-En Huang
  • Patent number: 11737285
    Abstract: A memory array includes at least one strap region having therein a plurality of source line straps and a plurality of word line straps, and at least two sub-arrays having a plurality of staggered, active magnetic storage elements. The at least two sub-arrays are separated by the strap region. A plurality of staggered, dummy magnetic storage elements is disposed within the strap region.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: August 22, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Po-Kai Hsu, Hui-Lin Wang, Kun-I Chou, Ching-Hua Hsu, Ju-Chun Fan, Yi-Yu Lin, Hung-Yueh Chen
  • Patent number: 11721553
    Abstract: A method for forming a semiconductor device includes providing a to-be-etched layer, forming a first mask layer on the to-be-etched layer, forming a patterned core layer on the first mask layer of a first region, forming a sidewall spacer material layer on the core layer and the first mask layer, removing the sidewall spacer material layer on a top surface of the core layer, removing the core layer and the first mask layer at a bottom of the core layer to form a first trench, removing the sidewall spacer material layer on the first mask layer of a second region, forming a first patterned layer exposing the first mask layer of the second region, and using the first patterned layer as a mask to remove the first mask layer of the second region to form a second trench.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: August 8, 2023
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Jisong Jin