Abstract: Two laser beams with a frequency difference are applied to a wafer mark on a wafer from an LIA (Laser Interferometric Alignment) system through a projection optical system, and diffracted light beams generated from the wafer mark are received by first to third light-receiving devices, respectively, in the LIA. The first light-receiving device receives first interference light comprising .+-.1st-order diffracted light beams (first processing mode). The second and third light-receiving devices respectively receive second and third interference lights comprising zeroth-order light and 2nd-order diffracted light (second processing mode). Alignment is effected by using either of the two processing modes which gives better measurement reproducibility.

Abstract: An improved photoelectric displacement detector is disclosed which includes (a) a light receiving part (1) having a pair of solar battery panels (1b, 1c) vertically arranged adjacent to each other, (b) a vertical motion mechanism (2) which is driven by a motor (3) to vertically linear-shift the light receiving part (1), (c) a vertical light quantity difference detection part (4) for detecting, based on signals from the solar battery panels (1b, 1c), a difference between the quantity of light received in the solar battery panel (1b) and the quantity of light received in the solar battery panel (1c) and (d) a CPU (5) for controlling the operation of the motor (3) according to the received light quantity difference detected by the vertical light quantity difference detection part (4). Reference laser light is sent onto the light receiving part (1) and the light receiving part (1) is vertically shifted in order that the aforesaid received light quantity difference is cancelled to zero.

Abstract: A device for checking lateral views at front/rear ends of a vehicle comprises an image pickup unit having a light path altering assembly and an image sensor and disposed at a front or rear end of a vehicle, for taking into the image sensor image information of areas on the right and left of the vehicle by way of the light path altering assembly and image information of an area ahead of the image sensor through a gap formed along an extension of an axial line of the image sensor; and a display unit provided in a room of the vehicle, for displaying the image information taken into the image sensor.

Abstract: Optical feedback control in an optical emitter-detector combination can be improved by fabricating the two devices on a single substrate. The feedback radiation can then travel within a monolithic structure. This arrangement will yield greater uniformity in devices as well as provide for easier mechanical assembly.

Abstract: A scan type exposure apparatus includes a first movable stage for carrying a reticle thereon and a second movable stage for carrying a wafer thereon, a projection system for projecting a pattern of the reticle onto the wafer through a projection optical system while scanningly moving the first and second movable stages in a timed relation, relative to the projection optical system, a first mark formed on the reticle and including a plurality of marks arrayed along a scan direction, a reference plate fixedly mounted on the second movable stage and having a second mark including a plurality of marks arrayed along the scan direction, a third movable stage for carrying the second movable stage thereon and being movable in a direction different from the movement direction of the second stage, and a photodetector fixedly mounted on the third movable stage.

Abstract: An optical isolator (10) includes an opto-electronic emitter (16) and an opto-electronic detector (17) mounted over offset portions (12, 13) of a leadframe (11). The offset portions (12, 13) form angles (14, 15) with other portions (24, 25) of the leadframe (11). An optically transmissive material (22) encapsulates the opto-electronic emitter (16) and the opto-electronic detector (17), and a reflective material (20) is located above the opto-electronic emitter (16) and the opto-electronic detector (17). An optically insulative packaging material (26) encapsulates the optically transmissive material (22).

Abstract: A method and apparatus for mounting an optical sensor in an optical instrument. The optical sensor is attached to a rigid substrate. The substrate has two locator holes, with the sensor mounted between the holes. Rigid locator pins attached to the housing of the instrument protrude into the locator holes. A spring pushing against the substrate forces the locator holes against corresponding locator pins, aligning the substrate within a plane. In a first embodiment, the holes are positioned so that the optical sensor is rigidly held at its midpoint, minimizing dimensional deviations along the length of the sensor with temperature change. The sensor assembly is easily removable and the mounting apparatus does not mechanically stress the substrate or the sensor with temperature changes. The mounting apparatus is easily manufactured, allows precise alignment, and is inexpensive.

Abstract: A waveguide type reduction type image sensor has a waveguide type light source having a light emitting element and a substrate including optical waveguides having a planar waveguide and a tapered waveguide. The waveguide type reduction type image sensor also has a light detecting section having a microlens array, an optical waveguide substrate and a CCD array. The microlens array converges reflected light from an original onto the incident face of the optical waveguide substrate. The optical waveguide substrate has L-shaped optical waveguides for guiding the converged light to the CCD array located on a substrate face perpendicular to the incident face. The CCD array converts the guided light to an electric signal and outputs this electric signal. A manufacturing method of this waveguide type reduction type image sensor is also shown.

Abstract: Medical and other instruments and devices (16, 44) may have a build-up of biological residue film, even after sterilizing. Dead cell membranes in this film can give off endotoxins. To check for the presence of biological residue film, light from a source (10, 40) travels along optical fibers (12, 42) and is focused by a lens (24) on a surface (26) to be examined. Reflected or transmitted light is conveyed by optical fibers (46) to an opto-electrical analyzing device (30, 48). In one embodiment, the opto-electrical device (30) senses the intensity of reflected light to provide an indication of reflectivity attributable to the biological film build-up. In another embodiment, a spectrophotometer (48) converts the returned light into an indication of the reflected spectrum which is analyzed (50) to determine the nature of the material which reflected the light, in particular the type of protein or other biological residue found on the examined surface.

Abstract: A rotation information detecting apparatus has a scale having a cylinder or a disc member with a grating portion provided over the entire circumference thereof, and a light projecting unit for applying a light beam to the grating portion. The apparatus also includes a fist light receiving unit, having at least one sensor, disposed to receive a light beam from the light projecting unit which has passed through first and second areas of the grating portion or a grating portion provided on another member. The incremental relative rotation information between the scale and a unit including the light projecting unit and the first light receiving unit is obtained by the light reception of the first light receiving unit.

Abstract: A method of and an apparatus for detecting information from a code marking formed on a carrier by illuminating the code marking with illuminating light and detecting an emission from an illuminated position on which the illuminating light is projected. The code marking is a two-dimensional code marking bearing the information in first and second directions perpendicular to each other, and an illuminated area at the illuminated position is of a fine ribbon-like shape having a length greater than a maximum possible width of the code marking in the first direction and smaller than a minimum possible information width in the second direction. Illumination of the code marking is carried out by moving in a direction parallel to the second direction while traversing in the first direction.

Abstract: An analog, optical-fiber measuring system compensates for variations in the level of light attenuation occurring in the optical path of the measuring system. The analog, optical-fiber measuring system utilizes a "reference" light transmitted along a common optical-fiber path as the actual "sensing" light. The reference light has a wavelength which differs from the sensing light's wavelength. Effects of the variations in the level of light attenuation are eliminated by monitoring the variations in the attenuation experienced by the reference light along the common optical-fiber path and adjusting the respective intensities of the reference light and the sensing light as a function of the variations. Because the effects of the variations in the level of light attenuation are compensated by an analog scheme, accurate measurement of the selected physical parameter is insured without the need for a microprocessor.

Abstract: A step-and-scan technique for patterning a photoresist film formed on a wafer comprises the steps of storing a relationship between a film thickness and an optimum offset amount of a focal position from the film surface, measuring a first ordinate of the wafer surface at each of the several focusing positions of the wafer, forming a photoresist on the wafer, measuring a second ordinate of the film surface to obtain a film thickness, exposing the photoresist film at each focusing position based on the optimum offset amount of the each focal position which is retrieved based on the film thickness.

Abstract: A light sensing array device including an array of photoelectric light sensing elements (10) individually addressable via sets of address conductors (12, 14) for use, for example, in image sensing or data input using a light pen, which is operable also in a power generating mode in which sensing elements in the array produce electrical power in the manner of a solar cell. To this end, the sets of address conductors are selectively connected via switching means (20, 21, 37, 38) to power output terminals (42, 43). The generated power may be used to supplement a power supply, e.g. using a battery pack, of the device or of electronic apparatus, such as a notebook computer, incorporating the device.

Abstract: A digitally filtered laser receiver includes a plurality of radiation sensors spacially arranged in a manner which identifies a relative position of the sensors with respect to a rotating laser radiation source. The digitally filtered laser receiver includes a microcomputer having inputs which are responsive to impingement of the sensors by radiation. The microcomputer is programmed to process data from the inputs only when the radiation sensors are impinged by radiation from the rotating laser radiation source. The microcomputer processes the data and provides an output which is indicative of the position of the rotating laser radiation source and the sensors.

Abstract: A photoelectric beam device comprises a light source, a monomode optical fibre, a transmitting optical unit, a reflector and a photodetector, where the transmitting optical unit comprises a collimation optical unit, e.g. in the form of a graded index lens or rod lens and a beam expansion optical unit e.g. in the form of a telescopic optical unit. A fibre-optic directional coupler, arranged between the light source and the monomode fibre, conducts to the photodetector the optical signal reflected back from the reflector to the transmitting optical unit and refocused into the fibre.

Abstract: A component-detection device for use in a component-mounting machine is described, which device comprises a foreground illumination system and a camera (30), this illumination system comprising at least an optical guide (40) arranged between the component (10) and the camera, and an associated set of radiation sources (45, 46, 47, 48) irradiating the optical guide. This provides a uniform foreground illumination for the component and a reliable detection of this component.

Abstract: A laser diode controlling method for a compact disk drive in which light is radiated from a laser diode to a compact disk and a radio frequency (RF) signal is generated by the light reflected from the compact disk, the method includes the steps of converting the light output from the laser diode into a first electrical signal, detecting the level of the RF signal, generating a second electrical signal by adjusting the level of the first electrical signal on the basis of the level of the RF signal, and generating a driving current for the laser diode on the basis of the second electrical signal. Therefore, various types of compact disks can be driven based on the reflectivity thereof with respect to a laser beam.

Abstract: An optical scanning device includes a light deflection unit for deflecting a light beam emitted by a light source to be incident on an object to be irradiated, a polarization state adjusting unit for adjusting the polarization state of the light beam, so that the light beam to be incident on the object to be irradiated has a predetermined polarization state with respect to the object to be irradiated, and a rotary driving unit for rotating the light deflection unit and the polarization state adjusting unit together so that the light beam deflected by the light deflection unit scans the object to be irradiated.

Abstract: An imager array includes a substrate with a plurality of superimposed layers of electrically conductive and active components. Sets of scan and data lines are electrically insulated from one another and also from a common electrode and active array components by dielectric material. Protection of the active components against static charge potential includes resistive means between the common electrode and a ground ring conductor around the array elements and in particular a thin film transistor circuit with a parallel pair of opposite polarity diode connected field effect transistors to safely drain the static charge during subsequent fabrication, test and standby period of the imager, while remaining in circuit during imager operation.