Abstract: A spectroscopic beam profile metrology system simultaneously detects measurement signals over a large wavelength range and a large range of angles of incidence (AOI). In one aspect, a multiple wavelength illumination beam is reshaped to a narrow line shaped beam of light before projection onto a specimen by a high numerical aperture objective. After interaction with the specimen, the collected light is passes through a wavelength dispersive element that projects the range of AOIs along one direction and wavelength components along another direction of a two-dimensional detector. Thus, the measurement signals detected at each pixel of the detector each represent a scatterometry signal for a particular AOI and a particular wavelength. In another aspect, a hyperspectral detector is employed to simultaneously detect measurement signals over a large wavelength range, range of AOIs, and range of azimuth angles.
Type:
Grant
Filed:
August 10, 2018
Date of Patent:
March 19, 2019
Assignee:
KLA-Tencor Corporation
Inventors:
Jiyou Fu, Noam Sapiens, Kevin A. Peterlinz, Stilian Ivanov Pandev
Abstract: A radiance sensor includes a memory and a microprocessor. The memory stores non-transitory computer-readable instructions and adapted to store a plurality of electrical signals output from a photodetector array in response to electromagnetic radiation transmitted through a lenslet array and incident on the photodetector array. The microprocessor is adapted to execute the instructions to (i) determine irradiance of the electromagnetic radiation in a detector plane from the plurality of electrical signals, each electrical signal having generated by a respective one of a plurality of photodetectors of the photodetector array, and (ii) reconstruct, from the determined irradiance, the 4D-radiance in an input plane, the lenslet array being between the input plane and the detector plane.
Type:
Grant
Filed:
April 21, 2017
Date of Patent:
March 12, 2019
Assignee:
Arizona Board of Regents on behalf of The University of Arizona
Abstract: An electro-optic liquid sensor may include a light source, an light detector, a prism, and a reflective optical member. The optical member may be arranged to reflect light emitted by the light source to the light detector when a liquid is disposed between the light source and the optical member. The electro-optic sensor may enable assessment of its operational state in the presence of liquid, thus improving on known electro-optic liquid sensors.
Abstract: Aspects of the invention generally relate to illumination gas imaging and detection. Camera systems can illuminate a target scene with light sources configured to emit absorbing and non-absorbing wavelengths with respect to a target gas. An image of the target scene illuminated with a non-absorbing wavelength can be compared to a non-illuminated image of the target scene in order to determine information about the background of the target scene. If sufficient light of the non-absorbing wavelength is scattered by the scene toward a detector, the target scene comprises an adequate background for performing a gas imaging process. A camera system can alert a user of portions of the target scene suitable or unsuitable for performing a gas imaging process. If necessary, the user can reposition the system until sufficient portions of the target scene are recognized as suitable for performing the gas imaging process.
Type:
Grant
Filed:
October 3, 2016
Date of Patent:
February 26, 2019
Assignee:
Fluke Corporation
Inventors:
Matthew F. Schmidt, Tyler B. Evans, Derek Hutton
Abstract: A plant matter sensor comprising: one or more emitters configured to emit two or more vertically spaced signals toward a plant; and one or more receivers configured to receive two or more reflected signals from the plant.
Type:
Grant
Filed:
May 20, 2016
Date of Patent:
February 19, 2019
Assignee:
C-DAX Limited
Inventors:
Greig Edgeworth Shearer, Jeremy Philip Henry Rowe, Robert Ian Murray
Abstract: The present disclosure relates to staggered arrays of individually addressable light-emitting elements for sweeping out angular ranges. One example device includes an astigmatic optical element. The device may also include an array of individually addressable light-emitting elements arranged to emit light towards the astigmatic optical element. The astigmatic optical element may be arranged to focus light emitted from each individually addressable light-emitting element to produce a substantially linear illumination pattern at a different corresponding scan angle within an angular range. The example device may further include a control system operable to sequentially activate the individually addressable light-emitting elements such that the substantially linear illumination pattern sweeps out the angular range.
Type:
Grant
Filed:
June 13, 2016
Date of Patent:
February 19, 2019
Assignee:
Google LLC
Inventors:
Sameer Ansari, Roman Lewkow, Jason Holt
Abstract: Provided is a back illuminated photo detector enabling easy determination of whether or not the radius of a beam spot on a light absorption layer is an appropriate size. The back illuminated photo detector includes: a semiconductor substrate having a first surface for receiving light; a semiconductor layer that is laminated on a second surface and includes a light absorption layer; a passivation film so as to expose a contact portion that is part of an upper surface of the semiconductor layer; and an electrode that is in contact with the semiconductor layer in the contact portion, and has a reflectance lower than that of the passivation film. The contact portion includes a center portion located on an optical axis, and an area of the center portion is smaller than a design cross-sectional area of a beam spot.
Abstract: An optical sensor arrangement comprises an optical barrier which is placed between a light-emitting device and a photodetector. Herein the light-emitting device and the photodetector are arranged on a first plane and are covered by a cover. The photodetector exhibits an active zone. The optical barrier exhibits an extent along a first principal axis, which is pointing parallel to the line connecting the centers of the light-emitting device and the photodetector. Herein the extent is greater than a dimension of the active zone. The optical barrier is designed to block light emitted by the light-emitting device that otherwise would be reflected by the cover by means of specular reflection and would reach the photodetector. The optical barrier is designed to pass light emitted by the light-emitting device and scattered on or above an outer surface of the cover.
Type:
Grant
Filed:
February 13, 2015
Date of Patent:
January 29, 2019
Assignee:
ams AG
Inventors:
Yu Wang, David Mehrl, Greg Stoltz, Kerry Glover, Tom Dunn
Abstract: Embodiments of the present disclosure provide an optical encoder for an electronic device. The optical encoder comprises an elongated shaft having an encoding pattern made up of axial markings and radial markings. The encoding pattern may be disposed around a circumference of the elongated shaft. The optical encoder also includes an optical sensor. In embodiments, the optical sensor includes an emitter and a photodiode array. The emitter causes light to shine on the encoding pattern. The encoding pattern reflects the light back to the photodiode array and the photodiode array determines movement of the shaft based on the reflected light.
Type:
Grant
Filed:
July 16, 2014
Date of Patent:
January 29, 2019
Assignee:
Apple Inc.
Inventors:
Fletcher R. Rothkopf, Prashanth S. Holenarsipur, Colin M. Ely
Abstract: There is provided an optical navigation module including an optical package and a light reflective element. The optical package includes an image sensor which has a sensor surface. The light reflective element is configured to reflect light propagating parallel to the sensor surface to light propagating perpendicular to the sensor surface to impinge on the sensor surface thereby performing the lateral detection.
Abstract: The optical device includes a light sensor positioned on a base. The light sensor is configured to receive an input light signal and outputs a passed light signal that includes light from the input light signal. The optical device also includes a return system located on the base. The return system is configured to receive the passed light signal from the light sensor and to return at least a portion of the light from the passed light signal back to the light sensor.
Type:
Grant
Filed:
September 14, 2015
Date of Patent:
January 29, 2019
Assignee:
Mellanox Technologies Silicon Photonics Inc.
Inventors:
Zhi Li, Dazeng Feng, Jacob Levy, Mohammad Esmaeili Rad
Abstract: An encoder includes an optical scale that is so provided as to be pivotable around a pivotal axis and includes a polarizing portion having a polarization characteristic, a light outputting portion that outputs linearly polarized light toward the polarizing portion, and a light detecting portion that detects the linearly polarized light from the optical scale. The light outputting portion includes a vertical cavity surface emitting laser, and light emitted from the vertical cavity surface emitting laser spreads at an angle greater than or equal to 5° but smaller than or equal to 20°.
Abstract: System for determining positions along a direction of advance, having a first sensor, particularly a line sensor, having a scanning length (L) for scanning a first 2D pattern and producing a scan signal. The first 2D pattern has pattern elements that each form a first code word on at least one portion of the scanning length (L), which first code word codes a position along the direction of advance absolutely. In addition, the first code word can be taken as a basis for determining a deviation from an ideal position for the first sensor in relation to the first 2D pattern.
Abstract: Methods, systems, and devices are disclosed for photoconductive switch package configurations. In some aspects, a photoconductive switch package includes of a wide bandgap photoconductive material (e.g., GaN, ZnO, diamond, AlN, SiC, BN, etc.), a source for energetic photons (e.g., a laser), a mechanism to couple the laser into the switch, and a mechanism for high voltage to enter and leave the switch package. In some implementations, the disclosed photoconductive switch packages can be configured as a three terminal device, e.g., similar to transistors, with one of the terminals being laser input or the voltage input to the laser system.
Type:
Grant
Filed:
July 7, 2016
Date of Patent:
January 15, 2019
Assignee:
Lawrence Livermore National Security, LLC
Inventors:
Scott D. Nelson, George J. Caporaso, Steven A. Hawkins, Hoang T. Nguyen, Stephen Sampayan, Li-Fang Wang
Abstract: An optical sensor and a deformation detection system in which the optical sensor is used. The optical sensor includes an optical fiber, an elongated hollow housing having an interior portion, and a material disposed on an inner surface of the housing that produces a persistent change in an optical signal transmission property of the optical fiber when the optical fiber contacts the material. The optical fiber elastically extends between opposing ends of the housing such that a bending deformation of the housing beyond a threshold radius of curvature causes a contact to occur between the material and the optical fiber. The contact results in persistent change in the optical signal transmission property of the optical fiber, which can be detected to determine whether deformation of the device occurred beyond a predetermined threshold value. The deformation detection system can use one or more of the optical sensors attached to the device.
Type:
Grant
Filed:
July 11, 2017
Date of Patent:
January 15, 2019
Assignee:
International Business Machines Corporation
Inventors:
Jonathan Bradbury, Jonathan Fry, Michael Kane
Abstract: An optical sensor and a deformation detection system in which the optical sensor is used. The optical sensor includes an optical fiber, an elongated hollow housing having an interior portion, and a material disposed on an inner surface of the housing that produces a persistent change in an optical signal transmission property of the optical fiber when the optical fiber contacts the material. The optical fiber elastically extends between opposing ends of the housing such that a bending deformation of the housing beyond a threshold radius of curvature causes a contact to occur between the material and the optical fiber. The contact results in persistent change in the optical signal transmission property of the optical fiber, which can be detected to determine whether deformation of the device occurred beyond a predetermined threshold value. The deformation detection system can use one or more of the optical sensors attached to the device.
Type:
Grant
Filed:
December 19, 2017
Date of Patent:
January 15, 2019
Assignee:
International Business Machines Corporation
Inventors:
Jonathan Bradbury, Jonathan Fry, Michael Kane
Abstract: Described are imaging systems that employ diffractive structures as focusing optics optimized to detect visual edges (e.g., slits or bars). The diffractive structures produce edge responses that are relatively insensitive to wavelength, and can thus be used to precisely measure edge position for panchromatic sources over a wide angle of view. Simple image processing can improve measurement precision. Field-angle measurements can be made without the aid of lenses, or the concomitant cost, bulk, and complexity.
Type:
Grant
Filed:
November 24, 2015
Date of Patent:
January 8, 2019
Assignee:
Rambus Inc.
Inventors:
David Geoffrey Stork, Mehjabin Sultana Monjur, Leonidas Spinoulas, Patrick R. Gill
Abstract: A device for regulating the supply to a photovoltaic converter, the device comprising: a laser source (2); a photovoltaic converter (6) that feeds a DC-DC converter (8); circuit (100) for regulating the input impedance of said DC-DC converter (8) as a function of the operating voltage (Us) of the photovoltaic converter (6) and of its no-load voltage (Us0); and circuit (42) for measuring an output voltage of the DC-DC converter (8) and for producing a regulation signal (SR) for regulating the laser source.
Abstract: An optical sensing circuit has a plurality of optical sensing units arranged so that the optical sensing circuit is ambient light insensitive or sensitive to light within certain spectrum. The sensitive spectra corresponding to the plurality of optical sensing units are different from one another.
Abstract: A pattern irradiation apparatus includes a light source unit, an objective that irradiates a sample plane with light emitted from the light source unit, a spatial light modulator of a phase modulation type that is arranged at a position conjugate with a pupil position of the objective and that modulates a phase of the light emitted from the light source unit, a light blocking member that is arranged in an optical path between the spatial light modulator and the objective and that is configured to block 0-order light generated by the spatial light modulator, and a control device that makes a correspondence between a focusing position of the 0-order light generated by the spatial light modulator and a position of the light blocking member.