Patents Examined by Ralph Kendall
  • Radial flow reactor including glow discharge limitting shield
    Patent number: RE30244
    Abstract: An improved radio frequency (rf) powered radial flow cylindrical reactor utilizes a gas shield which substantially limits the glow plasma discharge reaction to a section of the reactor over the semiconductor substrates which are to be coated. The gas shield permits the use of higher rf input power which contributes to the formation of protective films that have desirable physical and electrical characteristics.
    Type: Grant
    Filed: September 28, 1978
    Date of Patent: April 1, 1980
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventors: Frank B. Alexander, Jr., Cesar D. Capio, Victor E. Hauser, Jr., Hyman J. Levinstein, Cyril J. Mogab, Ashok K. Sinha, Richard S. Wagner