Patents Examined by Ram N Kachar
  • Heating apparatus with enhanced thermal uniformity and method for making thereof
    Patent number: 7901509
    Abstract: A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.
    Type: Grant
    Filed: October 16, 2006
    Date of Patent: March 8, 2011
    Assignee: Momentive Performance Materials Inc.
    Inventors: John Mariner, Ajit Sane, Toshiki Ebata, Marc Schaepkens, Xiang Liu, Wei Fan