Abstract: A new and improved, multi-phase pressure control valve for facilitating quick and accurate attainment and stabilization of gas pressure inside a semiconductor fabrication process chamber such as an etch chamber or CVD chamber. In one embodiment, the multi-phase pressure control valve is a butterfly-type valve which includes outer and inner vanes that independently control flow of gases from a process chamber to a vacuum pump. The larger-diameter outer vane stabilizes gas pressures within a large range, whereas the inner vane stabilizes pressure within a smaller range. In another embodiment, the multi-phase pressure control valve is a gate-type valve which may include a pivoting outer vane and an inner vane slidably disposed with respect to the outer vane for exposing a central gas flow opening in the outer vane.

Abstract: A proportional valve is disclosed for controlling the outlet pressure of a fluid flowing therethrough. The valve comprises a valve body having an inlet port and an outlet port for the fluid. The valve also has an inner chamber, within which there is formed a valve seat that may be opened and closed variably by a shutter axially movable from and towards the valve seat. Movement of the shutter is controlled by a shape memory alloy (SMA) actuating member operating antagonistically to an elastic member, the temperature of the fluid being lower than the transition temperature of the shape memory alloy. The actuating member and the elastic member are connected to the body valve at opposite sides relative to the valve seat. A power control circuit is also provided for circulating an electric current through the actuating member so as to heat the same by Joule effect from a temperature lower than the transition temperature to one that is higher.

Abstract: A low deviation pressure relief valve for a fuel pump consisting of a housing having an elongated bore having a continuous wall, an axis, shoulders arranged on the wall so as to extend toward the axis. A ball in the housing has a diameter at least less than the diameter of the bore and a ball retainer located in the bore upstream from the shoulders forms a ball seat by pre-coining process. The ball is smaller than the retainer seat in diameter to ensure an edge seal with the ball. A spring coaxial with the axis located down stream from the ball retainer and supported on the shoulders, and the ball is located between the spring and the ball seat wherein low flow restriction is created and reduced pressure variation is created as fluid flows past the ball and less buckling in the spring is created by guide ribs.

Abstract: The present invention relates to a valve device at dispensers which are adapted for dispensing portions of liquid or semi-liquid products (2), preferably foodstuff, from containers, and which have vacuum pumps (5) for generating a negative pressure in passage systems (6) through which the products (2) are dispensed from the containers. The valve device is a magnetic valve device (9) which is designed as a permanent magnet device with a valve body (9d) which automatically shifts or changes position when the vacuum pump (5) has emptied a container (e.g. 3), such that said vacuum pump (5) immediately thereafter can empty another container (e.g. 4).

Abstract: A cartridge insert for insertion in a fluid line is provided having a cartridge housing within which is located at least one backflow inhibitor and downstream at least one flow regulator. The backflow inhibitor has a closing element, which, in a closed position thereof, lies tightly sealed on a valve seat of the cartridge housing and which may be displaced from the closed position against a return force into an open position. A downstream guide pin projects from the closing element, and extends into a guide opening of a central regulator core of the flow regulator, and the flow regulator is formed from a regulator element made from an elastic material that surrounds the regulator core, which rests on an annular shoulder and defines a control gap, which changes with pressure between the above and an opposing enclosing wall.

Abstract: A one-way valve includes a plate and a flexible vane. The plate has a vent opening of a first size and shape. The plate has a first curvature. The flexible vane has a second curvature distinct from the first curvature. The vane is fixed to the plate in a manner facilitating the deflection of the vane between an open position and a closed position. The vane is in a bent condition in the closed position. The vane conforms to the first curvature of the plate over the vent opening, and covers the vent opening in the closed position. The vane is elastic throughout a range of deflection associated with the vane moving between the closed position and the open position.

Abstract: A multiple pressure direct acting relief valve is disclosed. The multiple pressure relief valve comprises an actuating cylinder, a relief valve and an adjustment screw interconnecting the actuating cylinder and the relief valve. The relief valve includes a low pressure spring which biases a poppet valve arrangement permitting the poppet valve arrangement to be actuatable at a first pre-determined pressure. The actuating cylinder includes a piston that is biased by a high pressure spring causing an additional compressive force to be applied to the poppet valve arrangement through an actuating rod received through the adjustment screw. When pressure is applied to the piston within the actuating cylinder, an additional compressive force is applied by the high pressure spring and the actuator rod to the poppet valve arrangement causing the poppet valve arrangement to be actuatable at a second pre-determined pressure.

Abstract: A one-way fluid valve member (10) to be mounted on a valve (12) body having a valve opening (18) surrounded by a valve seat (16). The valve member (10) includes,: a valve closure part (14) to be movably mounted on the body (12) for movement relative thereto between a first position engaging the seat (16) to prevent movement of fluid through the opening (18) in a predetermined direction, and a second position spaced from the seat (16) to allow fluid to pass through the opening (18) in a direction opposite the predetermined direction; and wherein the valve closure part (14) has a convex surface to engage the seat (16) so as to project into the opening (18).

Abstract: A heat sink assembly for cooling an electronic device comprises a fan housed in a shroud, the fan including a hub and fan blades extending therefrom for causing an axially directed airflow through the shroud upon rotation of the fan blades. A thermosiphon comprises an evaporator defining an evaporating chamber containing a working fluid therein and further including a condenser mounted thereabove. The thermosiphon is positioned at one end of the shroud such that the fan is aligned with the condenser for directing the axial airflow therethrough. The condenser includes a plurality of tubes forming a tube grouping. Each tube having an opening in fluid communication with the evaporator and for receiving and condensing vapor of the working fluid received from the evaporator. The tubes are axially aligned with the airflow and are laterally positioned such that a lateral width of the tube grouping is approximately equal to a width of the hub and substantially in lateral alignment therewith.

Abstract: An over-molded fluid control value for use in fluid delivery systems. An embodiment of the fluid control valve includes a rigid substrate having a opening defined therein, and a valve structure fabricated of an elastomeric material. The valve structure is over-molded over at least a portion of the rigid substrate and including a valve portion extending over the opening, the valve portion movable in response to a differential fluid pressure to allow fluid flow.

Abstract: A check valve for micro electro mechanical structure devices (MEMS), and in particular pertains to a check valve which is adapted to be employed in connection with micro electro mechanical structure devices which are intended to be employed with supercritical fluids constituting working fluids. In a preferred embodiment, the check valve is equipped with a bypass channel including a freely moveable plug structure which, in the open position of the valve enables the ingress of supercritical fluids under high superatmospheric pressures, and subsequent to the filling of the system, let down to atmospheric pressure, causes the plug to be moved into a permanent valve-closed position.

Abstract: A check valve construction is provided which includes a housing having a first flow path and a second flow path. Liquid flow is controlled within the first and second flow path by movable plungers (22, 24) having a sealing surface and a plurality of prongs that control the length of movement of the plunger within the housing. One of the plungers permits liquid flow while the other of the plungers prevents liquid flow in response to pressure change within the flow paths.

Abstract: A heat sink (10) is provided for use with a fan (16) for cooling an electronic component (12) wherein the heat sink (10) transfers heat from a heat rejecting surface (14) of the electronic component (12) to a cooling airflow provided by the fan (16). The heat sink (10) includes a heat conducting base member (20) having a substantially planar heat receiving surface (22) for overlaying the heat rejecting surface (14) of the electronic component (12) to receive heat therefrom, a heat conducting tower (24) extending from a side of the base member (20) opposite from the heat receiving surface (22) to receive heat therefrom, and a pair of serpentine fins (30) to transfer heat from the tower (24) to the airflow and the environment surrounding the heat sink (10).

Abstract: A constant velocity joint vent for use in a constant velocity joint of automotive vehicles. The constant velocity joint vent includes a flapper valve generally having a circular shape. The constant velocity joint vent also includes a first and second assembly post extending from an inside surface of the flapper valve. A circumferential compression limiter is also located on an inside surface of the flapper valve. The flapper valve also includes a sealing bead located at the outer periphery thereof. The flapper valve is connected via the first and second assembly post to a cover that includes an orifice for venting of high pressure gas to the outer atmosphere while also repelling contaminants from entering the constant velocity joint.

Abstract: An air mass flow controller valve containing at least two air channels that deliver desired air mass amount from a single inlet to fuel cell(s) through at least one channel of the at least two air channels. Preferably, a single housing encloses the inlet, two air channels and actuating devices. Each air channel includes an actuating device that actuates an associated closure member to regulate air flow from the inlet through the air channel as a function of a signal from an air mass sensor or a controller signal. The signal from each air mass sensor can be directly coupled to the actuating device, or the signal can be used as an error correction signal to feed back control the actuating device associated with the air mass sensor and the air channel.

Abstract: A leak control valve preventing the damage of the vacuum pump and/or the neighboring instruments even in the case of fluid leak at the vessel. The side wall of the valve poppet closes the channel to the outlet through restoring forces of the springs installed at both sides of the poppet in case when the abrupt pressure change happens by accident.

Abstract: A valve for controlling flow of fluid through an aperture in a barrier comprises a valve body including a pin and having a continuous sealing surface surrounding at least one opening through the valve body, and a diaphragm of resilient material. The diaphragm has an opening surrounded by an inner margin and is disposed with the pin extending through the opening and with a main surface presented towards the continuous sealing surface of the valve body. The inner margin of the diaphragm is in a state of tension around the pin of the valve body, whereby the diaphragm is prestressed to a condition in which the main surface of the diaphragm engages the sealing surface of the valve body.

Abstract: A relief valve includes an outer stem including a larger diameter fitting section and a smaller diameter fitting section, a movable valve element fitted in both fitting sections so as to be moved between an opening position and a closing position, a communication space extending through the stem and the valve element so that a compressed fluid flows through the space, a first normally closed seal disposed between the valve element and the smaller fitting section for closing a part of a circumferential gap defined between the valve element and the stem, a second seal disposed between the valve element and the larger diameter fitting section for closing a part of the circumferential gap extending from the larger diameter fitting section side to the communication space when the movable valve element has been moved to the closing position, the second seal opening the part when the movable valve element has been moved to the opening position, a relief hole formed in the stem so that the circumferential gap normall

Abstract: A non-return valve has a valve housing with a flow channel having a vertical channel section, an inlet aperture, an outlet aperture and a blocking device closing the flow channel. The blocking device comprises a valve seat surrounding the outlet aperture and a valve disc movable between an open position and a closed position. The valve disc is guided in the valve housing via a guide surface on its outer circumference, and comprises flow apertures radially outside its sealing surface. The valve disc possesses a diameter that becomes smaller towards the valve seat, forming an inclined external surface. Flow apertures start from the inclined external surface and converge in the direction facing away from the sealing surface, and are disposed in a uniform distribution over the circumference of the valve disc.

Abstract: A process for increasing or reducing the internal pressure of at least one hollow body (HK—1, HK—2, HK—3) to a specified set internal pressure. The set internal pressure is adjusted so that several pressure-increasing steps or pressure-reducing steps are conducted successively until the internal pressure deviates from the set internal pressure at most by a specified tolerance. Each of these steps brings about a pressure increase or pressure reduction the amount of which is not larger than a specified upper limit. In this way, impairments of comfort owing to the rise in pressure or the reduction in pressure are especially avoided. The actual internal pressure is only measured at the beginning of the process. In one design of the invention, this amount depends upon the volumes of the hollow bodies (HK—1, HK—2, HK—3) and a supply line (VL) as well as (in the case pressure is increased) from the pressure which a pressure generator generates.