Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

Abstract: To enable vibration conditions of a measured object to be measured with high accuracy independently of a laser oscillating wavelength. A vibration measuring means includes a laser resonator for oscillating a laser beam and generating beat waves through self-mixture of a returning beam obtained when the oscillated emitted beam is reflected by the measured object with a beam oscillated and emitted when the returning beam is received, a modulated beat frequency generation controller 8 for providing the beat waves with a modulated beat frequency that is higher than a Doppler frequency that is superposed on the returning beam while varying depending on a speed of the measured object, and a signal processor 21 for executing signal processing on the beat waves generated by the self-mixture in the laser resonator and outputting a result of the processing as vibration information.

Abstract: A method for monitoring and measuring the buildup of deposits on the inner surface of a pipeline containing flowing fluid comprises (a) transmitting a first acoustic signal into the pipeline through the pipeline wall, (b) receiving echoes of the transmitted signal, and (c) determining from the received echoes how far from the pipeline inner surface the interface between the deposits and the flowing fluid lies. An alternative method for monitoring and measuring the buildup of deposits on the inner surface of a pipeline containing flowing fluid comprises (a) transmitting a first acoustic signal into the pipeline through the pipeline wall, (b) receiving echoes of the signal, and (c) using the Doppler frequency shift of the received echoes to determine how far from the pipeline inner surface the interface between the deposits and the flowing fluid lies.

Abstract: A method for operating a monolithic, integrated, micromachined structure that includes a reference member and one or more dynamic members. Each dynamic member is supported from the reference member, either directly or indirectly, by torsion hinges. Supported in this way, each dynamic member exhibits a plurality of vibrational modes. Preferably, the structure is micromachined to establishes specified relationships between various pairs of vibrational modes. The method also includes applying force to each dynamic member that urges the member to rotate out of a rest position to a fixed particular angle.

Abstract: A surrogate component for shock testing is disclosed that includes a housing with exterior dimensions, mass, and a center of gravity approximately the same as the exterior dimensions, mass, and center of gravity of a counterpart component. The housing also has a stiffness greater than the counterpart component and has an interface for securing a sensor. In particular, the counterpart component may be hard drive and the housing may be constructed from a molybdenum material.

Abstract: An apparatus for tracking the varying resonant frequency of an electrically resonant structure, characterized by: a variable frequency oscillator providing an excitation signal of a variable frequency encompassing the possible resonant frequency range of the resonant structure, a bidirectional RF transmission line connecting the variable frequency oscillator and the resonant structure, the transmission line incorporating a directional coupler which generates a directional coupler signal proportional to the reflected signal from the resonant structure, the directional coupler signal being conditioned by a processor to provide a feedback signal to the input of the variable frequency oscillator, such that the mean frequency of the excitation signal is caused to continuously track the varying resonant frequency resonant structure.

Abstract: In a sensor for measuring angular velocity a body is formed from a planer substrate The body defines a beam, the opposed ends of which are adapted to be fixed in position, the beam having a preferential bending direction which makes an acute angle with the plane of the planar substrate. The beam carries an inertia mass comprising two arms interconnected by a connecting bar, the central part of the connecting bar being formed integrally with part of the beam. Capacitative plates located adjacent a conductive layer on the arms are provided with potentials which cause the inertia mass to rotate about the axis of the connecting bar with a “see-saw” action which, because of the configuration of the beam leads to a rotational oscillation of the inertia mass in the plane of the substrate. If the arrangement is rotated about an axis coincident with the connecting bar, the inertia mass rotates about an axis coincident with the beam with an oscillating rotation.

Abstract: In an apparatus comprising an inspection jig 10 including a sample mounting portion 11 for mounting a sample 1, a vibrator 22 for applying vibration to the sample 1 and a sound collector 20 for collecting a vibration sound when the vibration is applied to the sample 1 by the vibrator 22, and a sound detector 30 for conducting frequency analysis of the vibration sound collected by the sound collector 20, the defects of the sample are determined by sampling and analyzing the vibration sound when the vibration is applied to the sample 1 by the vibrator 22 on the time series.

Abstract: A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body (23) which moves a contact-type vibrating probe (100) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector (5) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller (31) for controlling movement of the support body (23) so that change in state quantity of a detection signal detected by the detector is constant.

Abstract: Ultrasonic techniques are applied to the measurement of wooden members to detect splitting during sawing operations and thereby allow modification of a sawing technique or change in saw cut placement.

Abstract: An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements are also coupled to the beams to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.

Abstract: A transducer for use in any of an accelerometer, a piezo-resistive strain gauge, a piezoelectric transducer, and surface acoustic wave transducers, the transducer having a beam and an electrode deposited on the beam, wherein the electrode is formed of a material having properties as compared to gold of: a low radiation capture cross-section, and high electrical conductivity.

Abstract: A sensor device for detecting a rotational angular velocity, an inclination and a linear acceleration, includes: a vibrating body; two detection portions to output signals in response to a vibration of the vibrating body; a differential circuit to output the difference between the signals output from the two detection portions; and a first synchronous detection circuit and second synchronous detection circuit to detect the output signal of the differential circuit. In the first synchronous detection circuit and second synchronous detection circuit the output signal of the differential circuit is detected in synchronization with respective signals having a phase difference of 90°.

Abstract: The present invention is an acceleration sensor chip having characterized a third layer formed on a first layer of a support substrate through an insulating second layer, where the third layer has a sensor structure. The second layer between the detection surface of the sensor structure and the first layer is removed. A beam part with a detection device, and a weight part with a plurality of cutouts of a same width are formed over the entire detection surface.

Abstract: There is provided an improved method of detecting an occurrence of a knock in an internal combustion engine by detecting an ionic current flowing in a cylinder of the engine from initiation of combustion therein and judging a knock component overlapping the ionic current based on a judging level, the method including the steps of: detecting a peak value of the ionic current; and relatively correcting at least one of the judging level and the knock component based on the peak value thus detected so as to make more difficult a judgment of whether the knock occurs or not as the detected peak value increases.

Abstract: An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements, deposited on the beams, are provided to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to eliminate the effects of quadrature oscillation and to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.

Abstract: The size reduction of an acceleration sensor having an acceleration detecting chip (ACa) and a signal processing chip (SCa), can be attained with an improvement in arrangement of both chips. Specifically, the acceleration detecting chip (ACa) is disposed in a through-hole (HL1) formed in the signal processing chip (SCa). A cap (CPa) is provided in order to prevent resin flowing into an acceleration detecting part (AS), when forming a resin encapsulation package.

Abstract: A device for measuring forces generated by unbalance of a rotor, in particular a motor vehicle wheel, includes a stationary frame, an intermediate frame positioned radially within the stationary frame, and first levers supporting the intermediate frame on the stationary frame. The first levers are arranged along imaginary lines that are either parallel to each other or intersect at a first virtual mounting position. A pivot bearing is supported on the intermediate frame by second levers, which are arranged along imaginary lines that intersect at a second virtual mounting position. Mounted coaxially in the pivot bearing is a measuring shaft, which is rotatable about a common axis of the measuring shaft and the pivot bearing. An outer force sensor measures displacement between the intermediate frame and the stationary frame. An inner force sensor measures displacement between the pivot bearing and the intermediate frame.

Abstract: A resonant element includes: a fixed substrate having a main surface in orthogonal X- and Z-directions; a planar vibrating body fixed via support beams so as to be vibratable in an X-direction, the planar vibrating body having a weight portion which is isolated from the fixed substrate; an exciter for vibrating the planar vibrating body in the X-direction, and means for adjusting the resonance frequency of said planar vibrating body by providing electrostatic forces to said planar vibrating body, and for correcting the tilt of said planar vibrating body with respect to the substrate plane direction of said fixed substrate, the tilt correcting means being provided at least opposing edge areas of said planar vibrating body with a gap therebetween in the X-direction, on the plane side and spaced from said planar vibrating body in a Y-direction orthogonal to the X- and Z-directions.

Abstract: A semiconductor physical quantity sensor has a beam connecting a movable portion and a support substrate for displacing the movable portion in a displacement direction. The beam has a rectangular frame shape with a hollow portion and is surrounded by a groove. The groove has opposing intervals at both sides of the beam in the displacement direction, and the opposing intervals are equal to an interval of the hollow portion in the displacement direction. Accordingly, etching rates at the groove and the hollow portion become approximately equal to each other, reducing processing variation of the beam.