Abstract: The present invention is a method, apparatus and process for an improved substrate mounting and processing technique for various substrate treatments comprising cleaning, dicing, sawing, polishing, and planarization, among others.

Abstract: Dishwashing machine comprising a programme sequence control unit, at least two rotating spray arms, a circulation pump (3) capable of operating even intermittently, a distribution valve (10) arranged directly on the delivery-side section (6) of the pump (3) and having at least a first and a second outlet (11, 13) which communicate with a respective rotating spray arm. The shutter member (20) of the valve, in accordance with the flow direction of the liquor at the delivery side (6) of the pump, is adapted to selectively displace both between said first and second outlets (11, 13) and into an intermediate seat (15) situated between the same outlets. The duration of the pauses in the intermittent operation of the pump (3), as controlled by the programme sequence control unit, is correlated to the actual pressure at the inlet of the valve (10) by the action of means (21) provided to monitor the localized pressure of the liquor.