Abstract: A transfer apparatus includes a base, a first holder, a second holder offset from the first holder in a first direction, and a movement mechanism for moving the first holder and the second holder relative to the base in a plane parallel to the first direction. The movement mechanism includes a swing member, a first link arm and a second link arm. The swing member is pivotally supported on the base. The first link arm is pivotally connected to the first holder. The first link arm is also connected to the swing member for pivoting about a first intermediate axis extending in a second direction perpendicular to the first direction. The second link arm is pivotally connected to the second holder. The second link arm is also connected to the swing member for pivoting about a second intermediate axis extending in the second direction. The first intermediate axis is offset from the second intermediate axis in the first direction.

Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.

Abstract: A component mounter is provided with a nozzle shaft holder which includes a through-hole into which a nozzle shaft, a component suction nozzle being installed on the bottom end thereof, is inserted, and bearings which are disposed in two locations separated vertically on an inner circumferential surface of the through-hole and which guide the nozzle shaft in the vertical direction. In the bearings, two ring-shaped guide portions which surround an outer circumferential surface of the nozzle shaft are formed separated in a vertical direction, a grease holder, which has a larger inner diameter than the ring-shaped guide portions, is formed between the two ring-shaped guide portions, and a space surrounded by the outer circumferential surface of the nozzle shaft, the two ring-shaped guide portions, and the grease holder is filled with grease.

Abstract: To reduce pumping time of a vacuum treatment chamber served by a transport arrangement in a transport chamber. The vacuum treatment chamber is split in a workpiece treatment compartment and in a pumping compartment in mutual free flow communication and arranged opposite each other with respect to a movement path of the transport arrangement serving the vacuum treatment chamber. The pumping compartment allows providing a pumping port of a flow cross-section area freely selectable independently from the geometry of the treatment compartment.

Abstract: Disclosed is a cable-driven parallel robot capable of changing a workspace, in which the cable-driven parallel robot is provided with an end effector having a plurality of modules that can efficiently move to upper and side parts of an object without interference. Module-direction changing standby stations are provided on each of opposing sides of an upper frame such that the modules of the end effector are coupled to the module-direction changing standby station for direction change standby, so that the modules can efficiently move to upper and side parts of the workspace without interference, thereby maximizing work efficiency. To this end, there is provided a cable-driven parallel robot including: an installation frame, and upper and side frames; a plurality of driving units; a plurality of cables; the module-direction changing standby station; and an end effector provided with a plurality of modules.

Abstract: The application provides a multi-storey warehouse. The warehouse includes a warehouse building, a plurality of floor levels, an inclined ramp arrangement, one or more automated storage and retrieval systems, and a handling device. The floor levels and the automated storage and retrieval system are located within the warehouse building. The inclined ramp arrangement connects the floor levels with a ground level. The automated storage and retrieval system comprises two adjacent rows of multi-storey pallet racks which are separated by an aisle. A first end of the automated storage and retrieval system is provided adjacent to a lateral side of the floor levels. The handling device is located in the area of the aisle, wherein the handling device serves a plurality of pick/place locations which are provided at the floor levels as well as a plurality of storage locations which are provided in the multi-storey pallet racks.

Abstract: A system includes an automated guided vehicle (AGV). A loading table is positioned on the AGV. The loading table is configured and sized to hold more than one storage container. A frame extends from the AGV. A robotic arm is mounted to the frame. In one form, the frame includes a gantry that moves relative to the rest of the AGV. Alternatively or additionally, the robotic arm is able to move relative to the gantry. By holding more than one storage container, the AGV facilitates automatic batch picking or placing of items. The gantry increases the degrees of freedom of movement of the robotic arm.

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract: A robot system includes: a cell; and a robot which is provided to move in the cell, in which the robot includes an n-th (n is an integer which is equal to or greater than 1) arm which rotates around an n-th rotating axis, and an (n+1)th arm which is provided to rotate around an (n+1)th rotating axis which is an axial direction different from an axial direction of the n-th rotating axis, in the n-th arm, in which the length of the n-th arm is longer than the length of the (n+1)th arm, and in which, when viewed from the (n+1)th rotating axis, the n-th arm and the (n+1)th arm overlap each other.

Abstract: The present invention provides a transfer robot which has a simple structure and a small occupied area in an operation. A transfer robot of the present invention includes a support member fixed to a side wall or the like, a transfer arm by which a hand member is held capable of linear movement, and first and second link members. One end portions of the first and second link members are rotatably linked to the support member, respectively. Another end portions of the first and second link members are rotatably linked to the transfer arm, respectively. The hand member holds/transfers a work. A rotational driving force applied to a linking portion between the support member and the first link member is transmitted to the transfer arm by a predetermined mechanism and linearly moves the hand member. The transfer arm moves by rotating the first link member or the second link member.

Abstract: The invention relates to an articulated arm robot for handling a payload, comprising a robot arm (R), which is attached to a base (1) that can be rotated about a first axis (A1), and at least two arm elements (2 and 3), which are arranged to form a kinematic chain and a first arm element (2) is mounted on the base (1) to pivot about a second axis (A2) that is oriented orthogonally relative to the first axis and a second arm element (3) which is attached to the first arm to be pivotal manner about a third axis (A3) that is oriented parallel to the second axis (A2).

Abstract: Universal component lift apparatus for moving components of electronic device manufacturing systems is described. The universal component lift apparatus includes a track, a truck moveable along the track, and a lift apparatus adapted to couple to the truck, the lift apparatus including a wheeled base, a lift portion, and a boom adapted to couple to the component. Electronic device processing systems and methods of moving components thereof are described, as are numerous other aspects.

Abstract: A working machine includes: a boom base portion including: an inner side wall; and an outer side wall disposed opposite to the inner side wall; a lift link disposed on a rear portion of the boom base portion; and a boom cylinder disposed in front of the lift link. One end side of the lift link is inserted between the inner side wall and the outer side wall and is pivotally supported on the boom base portion. The other end side of the lift link is pivotally supported on the machine body. One end of the boom cylinder is inserted between the inner side wall and the outer side wall in front of the lift link and is pivotally supported on the boom base portion. The other end of the boom cylinder is pivotally supported on the machine body by below the lift link.

Abstract: An overhead transport (OHT) system with multiple levels of rails for the transport of semiconductor workpieces is provided. A first vehicle is configured to travel on, and move a semiconductor workpiece along, a first rail. A second vehicle is configured to travel on, and move the semiconductor workpiece along, a second rail overlying the first rail. A controller is configured to control the first and second vehicles to transfer the semiconductor workpiece along the first and second rails, between process or inspection tools. A method for transferring semiconductor workpieces across multiple levels of rails is also provided.

Abstract: A feeder exchanging device capable of exchanging feeder provided with fixed blade and movable blade for cutting top film that is peeled from bottom tape as components are supplied to a component mounter. The feeder exchanging device comprises robot hand that includes pair of arms on which claws capable of clamping feeder are formed, and sliders that move robot hand in the X-axis, Y-axis, and Z-axis directions, with an actuator (rod actuator) for driving movable blade provided on robot hand.

Abstract: Manipulators in accordance with various embodiments of the invention can be utilized to implement statically stable robots capable of both dexterous manipulation and versatile mobility. Manipulators in accordance with one embodiment of the invention include: an azimuth actuator; three elbow joints that each include two actuators that are offset to allow greater than 360 degree rotation of each joint; a first connecting structure that connects the azimuth actuator and a first of the three elbow joints; a second connecting structure that connects the first elbow joint and a second of the three elbow joints; a third connecting structure that connects the second elbow joint to a third of the three elbow joints; and an end-effector interface connected to the third of the three elbow joints.

Abstract: A compact utility loader is operated by a standing operator at the rear of a frame. A loader arm assembly comprises a scissors linkage on either side of the frame nesting around the prime mover. Each scissors linkage has an upper loader arm that is pivoted at its rear end to rears ends of a pair of lower loader arms such that the pivot connections to the upper loader arm move upwardly and forwardly relative to the frame during elevation of the loader arm assembly to provide a high lift capability. The frame is self-propelled by a differential drive and steering system that is operated by dual levers. A hand grip extends between and unifies the operation of the levers to permit the operator to more easily move the levers in the ways that are needed to provide either straight motion of the frame or turns of the frame.

Abstract: Disclosed is a substrate conveyance apparatus that collectively conveys a plurality of substrates. The apparatus includes: a plurality of substrate placement racks disposed at intervals in a height direction and configured to simultaneously place the substrates thereon; a substrate placement rack holder configured to integrally hold the plurality of substrate placement racks; and a moving mechanism connected to the substrate placement rack holder and configured to integrally move the plurality of substrate placement racks. The moving mechanism includes: a first arm unit having a first support supported from an outside, and connected to one end of the substrate placement rack holder in a longitudinal direction; a second arm unit having a second support supported from the outside, and connected to another end of the substrate placement rack holder in the longitudinal direction; and a connecting portion which connects the first arm unit to the second arm unit.

Abstract: An article supply device includes a storage unit in which a plurality of articles are stored, a supply path, a partition/passing-through member that forms a predetermined gap between a surface of the supply path and the partition/passing-through member, a driving unit that allows the supply path and the partition/passing-through member to relatively move each other, and a gas injection unit that injects gas to the articles on the supply path in at least one of the upstream and the downstream of the partition/passing-through member.

Abstract: Provided is a working machine capable of accurately detecting a contaminant in grease contained in a slewing mechanism. The working machine includes a lower travelling body, an upper slewing body, and the slewing mechanism. The slewing mechanism includes: a ring gear fixed to the lower travelling body and having inner teeth; a pinion disposed on the upper slewing body and rotated in mesh with the inner teeth of the ring gear; and a grease bath disposed along an inner circumference of the ring gear for storing grease. The upper slewing body includes a sensor for detecting a contaminant having a potential for contaminating and deteriorating the grease, and a sensor supporting member supporting the sensor at a position that allows the sensor to revolve while being immersed in the grease in the grease bath.