Abstract: In a force sensor, a resonator is mounted by means of a dielectric layer on a bending element. Deformation of the bending element changes the resonant frequency of the resonator.
Type:
Grant
Filed:
September 8, 1994
Date of Patent:
September 10, 1996
Assignee:
Robert Bosch GmbH
Inventors:
Gerhard Benz, Franz Laermer, Andrea Schilp, Erich Zabler, Jurgen Schirmer, Werner Uhler