Abstract: An illumination apparatus illuminates a surface to be illuminated, by use of a light source, a secondary light source forming system for forming a plurality of secondary light sources from light emitted from the light source, and a lens system for forming a conjugate plane conjugate with a light entrance plane or a vicinity thereof of the secondary light source forming system after a color separation system for separating light from the secondary light source forming system into three beams of mutually different wavelength regions. A relay lens system is placed in a predetermined optical path out of three optical paths of the three beams color-separated. The surface to be illuminated does not agree with a paraxial image plane of the conjugate plane formed by the relay lens system.

Abstract: In an image reading apparatus, an original placed on an original glass table is illuminated by a light source, and a light beam corresponding to image information of an original surface illuminated with the light source is focused on a sensor by an imaging optical system. The sensor for reading image information is so disposed as not to be perpendicular to an optical axis of the imaging optical system. In an apparatus, &thgr;i≧sin−1(NAi) is satisfied, where &thgr;i is the tilt angle of the sensor with respect to the optical axis of the imaging optical system, and NAi is the numerical aperture of the imaging optical system on a sensor side.

Abstract: A device manufacturing apparatus includes a plurality of component units, and a cable element and/or a pipe element, for connecting one of the units with another, wherein the cable element or the pipe element connects the units through a member which is isolated from the units with respect to vibration, such that transmission of vibration between the units can be prevented.

Abstract: For extended long-post operation of a Steadicam®-type camera stabilizer while retaining static and dynamic balance throughout the entire range of post sizes and various component weights, the present invention is directed to an arrangement of telescoping posts, component positioning hardware, electrical wire retracting hardware, and optional hardware to augment rigidity.

Abstract: An exposure system comprises a first exposure apparatus having a first exposure field and a second exposure apparatus having a second exposure field larger than the first exposure field. A first shot map forming device is provided in the first exposure apparatus to form a first shot map by dividing an exposure region on a photosensitive substrate in units of first shot areas each corresponding to the first exposure field. A control unit transfers information on the first shot map to the second exposure apparatus. A second shot map forming device is provided in the second exposure apparatus to form a second shot map, based on the information on the first shot map, so that a number of shots becomes minimum when an exposure region including the first shot map on the photosensitive substrate is divided in units of second shot areas each corresponding to the second exposure field. A manufacturing method provides apparatus used in the exposure system.