Patents Examined by Sam Paik
  • Patent number: 6207932
    Abstract: A heater block for heating a wafer comprising a body member; a wafer support disposed on the body member, the wafer support containing a plurality of troughs which extend along the surface thereof; a plurality of heated elements disposed under the wafer support in the body wherein the heat generated from each of the heated elements is transferred to the wafer support; a gas line conmected to the wafer support for supplying gas to the plurality of troughs; means for supplying heat to the heated elements; and a controller connected to the heated elements for controlling the temperature of the heated elements.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: March 27, 2001
    Assignee: Hyundai Electronics Industries, Co., Ltd.
    Inventor: Jin-Seock Yoo
  • Patent number: 6172344
    Abstract: A conductive element useable as a resistance heater comprises a carbonized fabric (12) which has electrical terminals (18, 20) connected thereto and is encapsulated in or sandwiched between layers of plastic insulating material. The element generally is flexible and can be embodied in for example blankets for animals, vehicle seats and clothing. It is preferably provided with an electrical control circuit for controlling the temperature to which the fabric heats.
    Type: Grant
    Filed: July 25, 1996
    Date of Patent: January 9, 2001
    Assignee: Gorix Limited
    Inventors: John Yeats Gordon, John Robert Rix, Graham Gerrad
  • Patent number: 6138046
    Abstract: A dosimetry probe for monitoring light irradiation dosages and for providing irradiance measurements to monitor the application of light during a phototherapy procedure. The dosimetry probe includes a light delivery optical fiber operable to transmit optical radiation to target tissue and a plurality of dosimetry optical fibers substantially coextensive with the light delivery optical fiber, the distal ends of each of the dosimetry optical fibers arranged at a different axial distance from the light delivery optical fiber to provide irradiance measurements at a number of different axial distances. The dosimetry probe may include a safety feedback optical fiber to monitor the intensity of the treatment light independent of the influence of the optical properties of the target tissue. The dosimetry probe may also include a source dosimetry optical fiber for carrying a modulated dosimetry light signal, which can be selectively detected by means of frequency lock-in technology.
    Type: Grant
    Filed: April 20, 1999
    Date of Patent: October 24, 2000
    Assignee: Miravant Medical Technologies, Inc.
    Inventor: Brian Dalton
  • Patent number: 6133557
    Abstract: A wafer holding member comprises a ceramic base body and a heating resistor, an electrostatic adhesion electrode or a plasma generation electrode embedded in the base body. The wafer holding member exhibits reduced thermal expansion and greater corrosion resistance against halogenic gases. The heating resistor is made of a mixture containing 90 to 99 wt % of at least one of W, Mo, WC, TiC and TiN (the first component), and 1 to 10 wt % of AlN (the second component), the electrostatic adhesion electrode is made of a mixture containing 50 to 99 wt % of said first component, and 1 to 50 wt % of said second component, and the plasma generation electrode is made of a mixture containing 80 to 99 wt % of said first component, and 1 to 20 wt % of said second component.
    Type: Grant
    Filed: January 30, 1996
    Date of Patent: October 17, 2000
    Assignee: Kyocera Corporation
    Inventors: Yasunori Kawanabe, Kazuhiro Kuchimachi, Hironori Inoue, Saburo Nagano
  • Patent number: 6124575
    Abstract: A low voltage heating element is formed from a flat plate of partially conductive material, such as a graphite/polymeric composite. Food may be cooked thereon at power consumption levels of below 150 watts, thereby enabling use of batteries or solar cells as the energy source.
    Type: Grant
    Filed: March 16, 1999
    Date of Patent: September 26, 2000
    Inventor: Ernest C. Black
  • Patent number: 6107608
    Abstract: An apparatus and a method of actively controlling the temperature of a surface of a workpiece is disclosed. The apparatus includes a heat exchanger and a temperature controller thermally coupled to a chuck having a support surface to provide for active controlling of the temperature of the support and a surface of a workpiece, such as a semiconductor wafer, placed thereon. In a preferred embodiment, the chuck includes an interior region that forms a portion of the heat exchanger and is connected by an inlet and an outlet to a heat exchange medium source that provides for the recirculation of heat transfer medium through the interior region. In a preferred method of operation, a heat exchanger is provided relative to the wafer support surface to allow heat to be transferred between the heat exchanger and the support surface so as to achieve a predetermined temperature for the support surface and the wafer.
    Type: Grant
    Filed: March 24, 1997
    Date of Patent: August 22, 2000
    Assignee: Micron Technology, Inc.
    Inventor: Bruce L. Hayes
  • Patent number: 6097005
    Abstract: An apparatus includes a mounting table which is a main temperature controlling plate (a main cooling plate), a cooling section for maintaining the mounting table, for example, at 23.degree. C., a holding pin for holding a wafer while lifting it slightly off the mounting table, a mechanism for raising and lowering the pin, an auxiliary cooling plate as an auxiliary temperature controlling plate for cooling the wafer from the opposite side to the mounting table, and raising and lowering means for raising and lowering the auxiliary cooling plate to thereby move it close to and away from the wafer. The auxiliary cooling plate is maintained at a lower temperature than the main cooling plate. The wafer starts to be cooled by the main cooling plate and the auxiliary cooling plate, the auxiliary cooling plate is then moved away from the wafer at a temperature slightly higher than 23.degree. C., for example, at 30.degree. C., and thereafter the wafer is cooled only by the main cooling plate.
    Type: Grant
    Filed: August 19, 1999
    Date of Patent: August 1, 2000
    Assignee: Tokyo Electron Limited
    Inventor: Masami Akimoto
  • Patent number: 6067403
    Abstract: In this household electrical steam generator, particularly for smoothing irons, the water level within the boiler is stabilized by electronic and/or pneumatic action, electronic action being actuated by a temperature sensor positioned on that portion of the body of a usual armoured resistance element which is subject to emergence following reduction in the water level, to activate a make-up micro-pump transferring into the boiler cold water drawn from a reservoir, pneumatic action being actuated by a floating valve enabling air to enter during boiler cooling, in order not to enable the boiler to draw water from the reservoir through the body of the halted micro-pump.
    Type: Grant
    Filed: September 11, 1997
    Date of Patent: May 23, 2000
    Assignee: Imetec, S.p.A.
    Inventor: Arturo Morgandi
  • Patent number: 6064042
    Abstract: A reversible, self-contained cooking appliance. A heating plate is suspended between first and second insulating end stands. The heating plate has first and second cooking surfaces on opposite sides thereof and includes an integral heater. The end stands support the heating plate for cooking in a first orientation. One of the end stands is adapted to store the cooking appliance in a vertical position for storage. During use the end stands position a reflector between the heating plate and a support surface so that the reflector minimizes any heat transfer to the supporting surface. In a preferred form a drain is disposed along one end of the heating plate to allow grease and other cooking materials to drain into the reflector.
    Type: Grant
    Filed: February 19, 1999
    Date of Patent: May 16, 2000
    Assignee: Appliance Development Corporation
    Inventors: Dov Z. Glucksman, David H. R. St. George, Karl H. Weidemann
  • Patent number: 6057529
    Abstract: A switch which controls a heating element in terms of limiting its overheating and indicating both that the heating element is on and that it has a hot surface associated therewith is disclosed, particularly for use with range top cooking elements.
    Type: Grant
    Filed: May 29, 1998
    Date of Patent: May 2, 2000
    Assignee: Tutco, Inc.
    Inventor: Robert L. Kirby
  • Patent number: 6057532
    Abstract: There is described an infra-red radiation source comprising an electrically conductive element (2) formed of a plurality of carbon fibres and connection means (3, 4, 5) for connecting the electrically conductive element (2) across an electrical power supply, said connection means (3, 4, 5) including at least one support member (3) formed of carbon and secured to one end of the electrically conductive element (2).
    Type: Grant
    Filed: March 15, 1996
    Date of Patent: May 2, 2000
    Inventors: Amos Christopher Dexter, William Jones
  • Patent number: 6031209
    Abstract: A new and improved device for retaining utensils on a stove top. The device includes an electromagnet spaced a predetermined distance below the stove burner or attached thereto. In a first embodiment, the electromagnet may be electrically connected to a control knob on a gas stove which is likewise connected to an electronic ignition system. Accordingly, activating the burner will simultaneously activate the magnet allowing a pot or pan to be magnetically secured thereto. In a second embodiment, the electromagnet is electrically connected to a control knob on an electric stove which activates the burner. Therefore, the electromagnet will be activated simultaneously with the burner to magnetically secure a pot or pan thereto. Either embodiment may include a separate switch means for selectively interrupting power to each of the magnets allowing a user to periodically manipulate the pot or pan.
    Type: Grant
    Filed: March 26, 1998
    Date of Patent: February 29, 2000
    Inventor: Stephen F. Wiesman
  • Patent number: 6031968
    Abstract: A humidifying system particularly for incubators and a process for humidifying incubators is disclosed. The system includes a float valve with a sleeve-shaped float housing with a float body axially displaceable therein as well as a throttle valve influencing the flow of liquid. The throttle valve is actuated depending on the relative movement of the float body in relation to the float housing, and by the external diameter of the float body and the internal diameter of the float housing being selected to be such that a capillary gap wetted with liquid is present. With this construction, the reference level for the setting of the liquid level remains unchanged due to the float valve being designed as a hollow float body axially displaceable in a float housing with a liquid-filled, annular capillary gap between the float body and the float housing.
    Type: Grant
    Filed: June 6, 1997
    Date of Patent: February 29, 2000
    Assignee: Dragerwerk AG
    Inventor: Helmut Holtmann
  • Patent number: 6018615
    Abstract: A smoke generating apparatus includes a combustion chamber having an air flow inlet and an air flow outlet. A helical heating element is disposed in the combustion chamber. The helical heating element has a central flow axis. A smoke generating fluid injection tube is positioned along the central flow axis of the helical heating element.
    Type: Grant
    Filed: October 6, 1997
    Date of Patent: January 25, 2000
    Assignee: Graminia Developments Ltd.
    Inventor: Norton Marcus Loblick
  • Patent number: 6006009
    Abstract: A superheated vapor generator system comprises at least two vapor generators connectable to a controller for causing at least one of the superheated vapor generators to generate superheated vapor during a time interval in which the at least one other superheated vapor generator does not generate superheated vapor whereby at least one superheated vapor generator produces superheated vapor as desired during a selected time interval. The system may be adjusted to generate vapor substantially continuously.
    Type: Grant
    Filed: May 24, 1996
    Date of Patent: December 21, 1999
    Inventor: Max Friedheim
  • Patent number: 6002112
    Abstract: A cooking appliance with a glass-ceramic hob having a plurality of cooking zones at least one of which cooking zones is designated as a rapid cooking zone. The cooking zones can be heated essentially by electrically operated heating devices, and the rapid cooking zone is formed by a ceramic hot plate integrated into the glass-ceramic hob.
    Type: Grant
    Filed: February 12, 1998
    Date of Patent: December 14, 1999
    Assignee: Schott Glass
    Inventors: Peter Nass, Patrick Hoyer, Kurt Schaupert
  • Hob
    Patent number: 5994674
    Abstract: A hob comprises a substantially planar member having apertures defining hotplate regions, a glass-ceramic insert being positioned in each aperture above a radiant heating element. The use of a molded glass insert corresponding to a hotplate region offers several advantages over prior art hobs conventionally comprising a glass-ceramic sheet formed by a flat glass process which extends over a plurality of hotplate regions. Another embodiment consists of a drop-in heating unit for a hob comprising a metal can, a substrate, a resilient annular spacer, a radiant heating element and a molded glass-ceramic insert. An over-temperature thermal limiter acts to prevent the unit becoming overheated. A metal compression band extends around a downwardly protruding skirt of the insert, increasing its resistance to shock.
    Type: Grant
    Filed: April 4, 1997
    Date of Patent: November 30, 1999
    Assignee: GDA Applied Energy Limited
    Inventor: Maurice Hugh Carter
  • Patent number: 5990457
    Abstract: A glass-ceramic cooktop includes a glass-ceramic plate having a periphery. At least one heating body is disposed below the glass-ceramic plate. A sprayed-on plastic frame embraces the periphery of the glass-ceramic plate and has an upper surface. A protective lining of high-temperature-proof material embraces the glass-ceramic plate and is disposed on the upper surface of the plastic frame.
    Type: Grant
    Filed: June 25, 1998
    Date of Patent: November 23, 1999
    Assignee: BSH Bosch und Siemens Hausgeraete GmbH
    Inventors: Herbert Steiner, Manfred Edlmann, Rudolf Meierhofer
  • Patent number: 5991507
    Abstract: An evaporator (1) for evaporating volatile liquids (2), in particular liquid insecticides, has a container (3) for the liquid (2), a wick (4) that takes up the liquid and a heating element associated to the wick. In order to improve such an evaporator so that it is easier to handle and at the same time completely evaporates the liquid in the container, the wick is spaced apart from the container and is connected thereto by a liquid supply duct.
    Type: Grant
    Filed: November 6, 1997
    Date of Patent: November 23, 1999
    Assignee: Perycut-Chemie AG
    Inventor: Franz Bencsits
  • Patent number: 5981913
    Abstract: There are provided a static electricity chuck which can vary the temperature of a wafer in a short time without adversely effecting throughput, and a wafer stage having the static electricity chuck. The static electricity chuck includes a dielectric member 4 formed of insulating material, an electrode 5 of conductor which is disposed at the lower side of the dielectric member 4, and a heater 6 which is disposed at the lower side of the electrode 5 and heats the dielectric member 4. The wafer stage 1 includes the static electricity chuck which is provided on a metal jacket having cooling apparatus.
    Type: Grant
    Filed: March 20, 1997
    Date of Patent: November 9, 1999
    Assignee: Sony Corporation
    Inventors: Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Kinya Miyashita, Seiichirou Miyata, Yoshiaki Tatsumi