Patents Examined by Sammuel M Heinrich
  • Patent number: 8288681
    Abstract: A laser processing apparatus is provided. The laser processing apparatus removes and extracts debris generated by irradiating a transparent resin layer formed on a substrate with laser light during a patterning process, and includes a debris extraction module provided on the upper side of the substrate, wherein the debris extraction module sucks and extracts debris due to sublimation, thermal processing and composite action thereof generated from the transparent resin layer on the substrate irradiated with the laser light from the lower side thereof.
    Type: Grant
    Filed: September 6, 2006
    Date of Patent: October 16, 2012
    Assignee: Sony Corporation
    Inventors: Hidehisa Murase, Yoshinari Sasaki, Kosei Aso, Naoki Yamada