Abstract: A semiconductor manufacturing apparatus including at least one load module including a load port on which a substrate container is located, a plurality of substrates being mountable on the substrate container; at least one loadlock module including a loadlock chamber directly connected to the substrate container, the loadlock chamber interchangeably having atmospheric pressure and vacuum pressure, a first transfer robot within the loadlock chamber, and a substrate stage within the loadlock chamber, the plurality of substrates being mountable on the substrate stage; a transfer module including a transfer chamber connected to the loadlock chamber, a second transfer robot within the transfer chamber, and a substrate aligner within the transfer chamber; and at least one process module including at least one process chamber connected to the transfer module.

Abstract: High density, robotic warehouse systems and processes may include one or more blocks of a storage system, each block including a plurality of floors, and each floor including a plurality of storage grid locations for respective totes. A plurality of first robotic drive units may transfer barges carrying totes between various processing stations and the storage system. A plurality of second robotic drive units may operate within the storage system and traverse the storage grid locations using a plurality of highway grids and elevators to move totes between barges and storage grid locations. The freely movable robotic drive units, barges, and totes enable high flexibility, modularity, scalability, and serviceability of the high density, robotic warehouse systems.

Abstract: An automated storage and retrieval system comprises a rail system comprising a first set of parallel tracks arranged in a horizontal plane and extending in a first direction, and a second set of parallel tracks arranged in the horizontal plane and extending in a second direction which is orthogonal to the first direction, which first and second sets of tracks form a grid pattern in the horizontal plane comprising a plurality of adjacent grid cells, each comprising a grid opening defined by a pair of neighboring tracks of the first set of tracks and a pair of neighboring tracks of the second set of tracks; and a plurality of stacks of storage containers arranged in storage columns located beneath the rail system. Each storage column is located vertically below a grid opening.

Abstract: A holding technology whereby an article, i.e., a subject to be held, can be stably held by increasing a contact area with respect to the article. An article holding device includes a holding main body, a suction mechanism, and a sandwiching mechanism. The sandwiching mechanism includes sandwiching arms, which come into contact with one side of the article, and a board-like sandwiching plate that comes into planar contact with the other side of the article.

Abstract: Embodiments are directed to an assistive robot system. The assistive robot system includes a lifting mechanism, a movable arm assembly coupled to the lifting mechanism, a container tilting arm assembly, a processing device communicatively coupled to the lifting mechanism and the movable arm assembly, and a non-transitory, processor-readable storage medium in communication with the processing device. The non-transitory, processor-readable storage medium causes the processing device to transmit a command to the lifting mechanism to cause the lifting mechanism to move the movable arm assembly such that the container tilting arm assembly makes contact with a container and transmits one or more signals to the movable arm assembly to cause the movable arm assembly to extend in a system longitudinal direction such that the container within the movable arm assembly is pivoted against the container tilting assembly to tilt the container within the movable arm assembly.

Abstract: The present disclosure discloses a power-taking device for a rail guide vehicle. The rail guide vehicle includes a chassis travelling mechanism and a loading mechanism including a fixing plate, a power plate, an extension plate and a shifting fork, the fixing plate is fixed to the chassis travelling mechanism, the power plate and the extension plate can be translated, and the shifting fork is coupled to, can be translated in synchronization with, and can be rotated with respect to the extension plate. The power-taking device includes: a first conductive part, fixed to the fixing plate; a second conductive part, fixed to the power plate; and a third conductive part, fixed to the extension plate. When the first, second and third conductive parts are in contact, the power-taking device is turned on.

Abstract: Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.

Abstract: A vehicle for receiving and delivering granular material, such as agricultural seeds, includes a frame supporting a container defining an open top chamber having a bottom outlet. An elongated conveyor is supported by a system which includes a first support arm having one end pivotally connected to a side wall of the container for multiple directional movement and a second support arm pivotably connected to the opposite end of the first support arm. The opposite end of the second support arm supports an intermediate portion of the conveyor near its center of gravity and in suspended relation for tilting and rotating the conveyor. Power actuators are connected to rotate and pivot the first support arm to position the conveyor in many selected positions including the conveyor inlet under the outlet of the chamber, a storage position and a position between horizontal and substantially inclined for filling other containers.

Abstract: A housing for a hydraulic actuator unit of a pallet truck is disclosed. The housing includes a lift motor mount for mounting a lift motor to the housing and a pump mount for mounting a hydraulic pump to the housing, and couples the pump to the lift motor when each are mounted. The housing includes a hydraulic cylinder with a cylinder rod, which is positioned based on the fluid level in the hydraulic cylinder; a reservoir to store fluid for actuation of the cylinder rod; and one or more fluid galleries that extend, internal to the housing, among the fluid reservoir, the pump mount, and the hydraulic cylinder. A traction motor mount mounts the traction motor, which is coupled to a steering unit of the pallet truck and controls actuation of a traction wheel of the pallet truck when the traction motor is mounted to the traction motor mount.

Abstract: In a substrate transfer mechanism, a moving body moves horizontally, and a support body is provided at the moving body to rotate about a vertical shaft. A first rotary shaft and a second rotary shaft are disposed vertically. A first arm forms a first substrate support region for supporting a first substrate, the first arm having a base portion connected to the first rotary shaft and a tip portion rotating at an outer side of the support body. A second arm forms a second substrate support region for supporting a second substrate, the second arm having a base portion connected to the second rotary shaft and a tip portion rotating the outer side of the support body. Further, an elevating mechanism is configured to raise and lower the second rotary shaft depending on a direction of the second arm with respect to the support body.

Abstract: A work tool includes a bucket and a hydraulic actuator that pivots the bucket on a frame. The loaded bucket applies a maximum compressive force Fc against a resilient bump stop, which reacts a proportion of the applied force as a restoring force Fr against the actuator. A major proportion of the applied maximum compressive force Fc is reacted between the piston and cylinder, while the restoring force Fr is arranged to be greater than the force Fe applied by the self weight of the empty bucket, such that (Fc>2·Fr), and (Fr>Fe).

Abstract: An artificial epidermis structure capable of using a gel substance to adjust a frictional property with high precision is provided. When a front surface of a lid member comes into contact with a target object and pressure acts on the lid member, a part of the gel substance can escape into a space that is formed by concave portions on a front surface of a gel substance. Therefore, reduction in a repulsion force of the gel substance is achieved. Accordingly, the pressure can be appropriately transmitted to the gel substance via the lid member, and convex portions of the gel substance can be caused to easily bulge out over the front surface of the lid member via holes of the lid member.

Abstract: A bulk bag conditioner assembly is disclosed herein. The assembly includes a frame assembly defining a bulk bag conditioning area. The frame assembly includes a first carrier frame with a first ram, and a second carrier frame with a second ram. A first actuator assembly includes a first end fixed to the first carrier frame and a second end fixed to the second carrier frame. A second actuator assembly includes a first end fixed to the first carrier frame and a second end fixed to the second carrier frame. A control unit is configured to simultaneously drive the first ram and the second ram linearly towards each other to engage a bulk bag within the bulk bag conditioning area.

Abstract: Provided is a substrate holder including a first holding member and a second holding member configured to sandwich and fix a substrate, wherein the first holding member includes a first holding member body, and a clamp provided on the first holding member body, the clamp being rotatable about a shaft extending parallel to a surface of the first holding member body, or being reciprocable in a direction intersecting with the surface of the first holding member body, the second holding member includes a second holding member body, and the clamp is capable of engaging with the second holding member in a state where the first holding member body and the second holding member body are brought into contact with each other, to fix the second holding member to the first holding member.

Abstract: A top loading assembly is provided. The assembly includes a robotic arm and an article collector assembly supported thereby. The robotic arm is characterized by first and second arm segments and three pivotable arm joints, a first arm joint J1 being a distal arm joint for operatively supporting said collector assembly, a second arm joint J2 being an intermediate arm joint, and a third arm joint J3 being a terminal/anchorable arm joint. The collector assembly, directable from an article collection locus to a collected article loading locus, includes a collector adapted to effectuate select clamping in relation to articles collected by the collector during direction of the collector assembly from the article collection locus to the collected article loading locus.

Abstract: A gripping mechanism which grips an object includes a main body section, a first gripping section, and a second gripping section. The first and second gripping sections are connected, with a space therebetween, to the main body section. The first gripping section includes a first roller and a first frame. The first frame houses the first roller. The first gripping section grips a first portion of an object between an outer surface of the first roller and an inner surface of the first frame using gravity acting on the first roller. The second gripping section includes a second roller and a second frame. The second frame houses the second roller. The second gripping section grips a second portion of the object, differing from the first portion, between an outer surface of the second roller and an inner surface of the second frame using gravity acting on the second roller.

Abstract: A remotely operated vehicle assembly for an automated storage and retrieval system moves a product item between a storage container stored in an automated storage and retrieval grid configured to store a plurality of stacks of storage containers, and target containers. The remotely operated vehicle assembly includes a first vehicle including a vehicle body and a wheel arrangement connected to the vehicle body configured to move the remotely operated vehicle along a rail system of the automated storage and retrieval system; and a picking system for moving the product item. The first vehicle includes a container lifting device configured to carry a first target container. The vehicle assembly further includes a second vehicle including a vehicle body and a wheel arrangement connected to the vehicle body configured to move the remotely operated vehicle along a rail system of the automated storage and retrieval system.

Abstract: An embodiment is a processing system for processing a substrate. The processing system includes a Front Opening Unified Pod (FOUP) load lock (FLL) and a vacuum system. The FLL has walls defining an interior space therein. The FLL includes load lock isolation and tunnel isolation doors. The load lock isolation door is operable to close a first opening in a first sidewall of the FLL. The first opening is sized so that a FOUP is capable of passing therethrough. The tunnel isolation door is operable to close a second opening in a second sidewall of the FLL. The second opening is sized so that a substrate is capable of passing therethrough. The vacuum system is fluidly connected to the interior space of the FLL and is operable to pump down a pressure of the interior space of the FLL.

Abstract: An end effector includes an elongated body that is non-circular in cross section. A guide rail is mounted on a top surface of the elongated body. A hook carriage includes a linear motion guide that moves linearly along the guide rail to position a hook member. A locking mechanism locks the hook carriage at a preselected position along a length of the guide rail.

Abstract: A hopper-in-frame for transporting granular proppant material, such as oil well sands subjected to fracturing, having a top loading through a hatch in the roof and lateral gravity discharge opening at the level of the hopper floor and not below the hopper through a lower side discharge opening where the load asymmetry is compensated for by the inclusion of an asymmetric roof that includes at least a portion of the roof asymmetrically lowered, such as a sloping roof or sloping to the side of the wall of download. The hopper-in-frame is supported and delimited by a frame that in turn is compatible to be incorporated in intermodal cargo containers.