Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
Type:
Grant
Filed:
February 5, 1999
Date of Patent:
September 3, 2002
Assignee:
Rosemount Aerospace Inc.
Inventors:
Bradley J. Boggs, Marcus S. Just, Kevin C. Stark, Christopher A. Bang