Abstract: A short circuit detection apparatus includes a capacitor connected to a high potential side of a semiconductor switching device via a diode and a resistor connected in series, a short circuit determination circuit that detects a terminal voltage of one terminal of the capacitor, and determines that the semiconductor switching device has short-circuited when the terminal voltage is equal to or greater than a threshold voltage, and a voltage control circuit that is provided between another terminal of the capacitor and a low potential side of the semiconductor switching device, switches between a conduction and an interruption of the capacitor and the semiconductor switching device, and applies an offset voltage between the capacitor and the semiconductor switching device when conducting.

Abstract: An energy harvesting circuit for harvesting energy from a medium voltage power line. The energy harvesting circuit includes an input capacitor electrically coupled to the power line and storing power therefrom, and a flyback converter including a primary coil and a secondary coil. The harvesting circuit further includes a switching circuit electrically coupled in series with the primary coil and being operable to electrically connect and disconnect the input capacitor to and from the primary coil, where the switching circuit includes an input voltage regulation feedback circuit for regulating an input voltage provided to the switching circuit from the input capacitor. The harvesting circuit also includes an output capacitor electrically coupled to the secondary coil and the actuator, where the output capacitor is charged by the secondary coil when the switching circuit is closed to provide power to an actuator to close a vacuum interrupter.

Abstract: An electrostatic chuck includes a chuck body which supports a substrate, at least one pin hole penetrating the chuck body in a vertical direction, a lift pin disposed in one of the at least one pin hole, wherein the lift pin moves along the one of the at least one pin hole, and an expansion member which is provided at an inner circumference of the one of the at least one pin hole, the expansion member having an inner circumferential surface that, in response to a first power, selectively holds or releases an outer circumferential surface of the lift pin.

Abstract: A device for door and phase segregation in low voltage circuit breakers, in particular in molded case circuit breakers, having a plurality of phases each provided with a lug for electrical connection of said circuit breaker and a venting aperture for venting off gases, the device comprising a conductive element adapted to be fixed to a corresponding lug of the circuit breaker and provided with electrical connection means for electrical connection of the circuit breaker, comprising a first insulating element covering the conductive element and/or a second insulating element adapted to be interposed between two adjacent phases of the circuit breaker.

Abstract: A magnetizer system for use with a medical device including ferrous elements. The magnetizer can include a magnetizer body defining a cavity, the magnetizer body having a body opening in communication with the cavity, the magnetizer body including one or more magnets configured to generate a magnetic field configured to imprint a magnetic signature on ferrous elements within the cavity. The magnetizer can include one or more mechanisms configured to detect the presence of the medical device.

Abstract: Systems and methods to mitigate electrical voltage on a rotating shaft in an oil rich environment exposed to a viscous fluid or immersed in oil are disclosed. An example grounding brush assembly includes a plurality of conductive filaments configured to extend through the viscous medium surrounding the rotating shaft to be in electrical contact with the rotating shaft when the brush assembly is disposed proximate the shaft.

Abstract: Disclosed herein are medical-device magnetizer systems and methods. In an example, a magnetizer system can be configured to impart one or more magnetic signatures to a medical device having ferrous elements for medical-device tracking. Such a magnetizer system can include, in some embodiments, a magnetizer. The magnetizer can have an elongate body with a single-dipole section, a multipole section, and a plurality of magnets configured to generate two or more magnetic fields. The single-dipole section can have a magnetizer body defining a cavity having a first magnetic field therein. The multipole section can have a second magnetic field therein. In another example, a method can include imparting a magnetic signature to a plurality of medical devices having ferrous elements using the magnetizer system.

Abstract: A transport device and a transport method efficiently increase a thrust to suppress power consumption. The transport device has a first magnetic body on a side of a to-be-transported object, a magnetic circuit with a core consisting of a second magnetic body, and a winding wound around an outside of the core, and a drive circuit supplying a current to the winding of the magnetic circuit. The magnetic circuit has first and second magnetic circuits, and in a case where the first magnetic body is located on a side of the second magnetic circuit relative to a first predetermined position between the first magnetic circuit and the second magnetic circuit, the drive circuit supplies a current to a winding of the first magnetic circuit in such a manner to cause an electromagnetic repulsive force to be generated between the first magnetic body and the first magnetic circuit.

Abstract: An electrostatic chuck heater includes an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body, a cooling member cooling the electrostatic chuck, and a heater layer disposed between the electrostatic chuck and the cooling member and including a plurality of metal layers embedded therein in multiple stages, the metal layers including resistance heating element layers. The heater layer includes a ceramic insulating layer with a thickness of 2 ?m or more and 50 ?m or less between the metal layers.

Abstract: An electrostatic chuck includes: a base body having: a mounting face on which an object to be adsorbed is to be mounted; and a back face that is opposite to the mounting face; an insulating layer that is formed on the back face; a heating element that is built in the insulating layer and configured to generate heat; and at least one thermal diffusion layer that is built in the base body and configured to diffuse the heat generated by the heating element. The at least one thermal diffusion layer is formed of a material higher in thermal conductivity than the base body.

Abstract: A current limiting circuit includes a first voltage terminal, a second voltage terminal, a first transistor and a current limiting module. An input terminal of the first transistor is electrically connected to the first voltage terminal, and an output terminal of the first transistor is electrically connected to the second voltage terminal. The current limiting module is electrically connected to the input terminal of the first transistor and a control terminal of the first transistor. The current limiting module is configured to control voltage difference between the control terminal of the first transistor and the input terminal of the first transistor for controlling a state of the first transistor so that a current limiting value of the current limiting circuit is adjustable.

Abstract: This technology relates to a destruction validation system. The destruction validation system includes a destruction device and a controller. The controller is configured to monitor current drawn by the destruction device during destruction of the piece of physical media. The controller may compare the current drawn to a current profile. Based on the comparison of the current drawn to the current profile, the controller may generate and output a notification indicating whether the piece of physical media has been destroyed. In some instances, the destruction device includes a current sensing device. The current sensing device may be configured to detect the current drawn by the destruction device and transmit the detected current drawn to the controller. The current drawn that is monitored by the controller may be the detected current drawn by the current sensing device.

Abstract: A substrate processing apparatus is provided. The apparatus comprises a chamber; a substrate support which is arranged in the chamber and has at least one first gas supply path; and at least one control valve configured to control a flow rate or pressure of gas supplied through the at least one first gas supply path. The substrate support includes a base, and an electrostatic chuck which is arranged on the base and has an upper surface. The upper surface has a plurality of protrusions and a first annular groove group. The first annular groove group comprises a first inner annular groove, a first intermediate annular groove, and a first outer annular groove. Any one of the first inner annular groove, the first intermediate annular groove, and the first outer annular groove communicates with the at least one first gas supply path.

Abstract: An overcurrent protection circuit is provided for protecting an overcurrent flowing through a switching element that is controlled to be turned on and off based on a drive signal. The overcurrent protection circuit includes: a first transistor that is an N-channel field effect transistor (FET) having a drain connected to a control terminal of the switching element and a grounded source; a second transistor that is a PNP bipolar transistor having an emitter connected to the control terminal of the switching element, a collector connected to a gate of the first transistor and grounded via a first capacitor, and a base pulled up to a predetermined pull-up voltage; and a ground circuit connected in parallel with the first capacitor.

Abstract: A leakage current detection and interruption device includes a switch module for controlling electrical connection of power supply lines between input and output ends; a leakage current detection module, including first and second leakage current detection lines respectively covering the first and second power supply lines, to detect leakage current thereon and to generate respective first and second leakage signals in response thereto; a signal processing module, coupled to the leakage current detection module to receive the first and/or second leakage signals and to generate a leakage fault signal in response thereto; and a trigger module, coupled to the switch module and the signal processing module, to receive the leakage fault signal and in response thereto, to drive the switch module to disconnect the electrical connection to the output end. The device can detect current leaks on the two power supply lines and is simple, low-cost and reliable.

Abstract: A substrate processing apparatus and a method of fabricating the same are proposed. A bonding layer, by which a chuck body and a base plate of an electrostatic chuck device are bonded, is completely covered using a double-sealing structure in which a covering member for preventing a processing gas from infiltrating into the bonding layer and a sealing member for preventing the bonding layer from being damaged are bonded to each other. The durability and the efficiency of the operation of the electrostatic chuck device are improved.

Abstract: The present invention relates to a conductive lift pin used in an electrostatic chuck, an electrostatic chuck including same, and a semiconductor manufacturing method using same. Provided in the present invention are a conductive electrostatic chuck lift pin and an electrostatic chuck having the lift pin mounted therein, the lift pin including AlTiC, which has a TiC phase dispersed on an Al2O3 phase, and having electrical resistivity of 2.5x10?5 to 3.5x10?5 ?·m. The electrostatic chuck lift pin of the present invention can solve the problem of defects induced by static electricity and electric reaction due to contact between the components and insulating ceramic when using existing insulating ceramic, and is conductive and thus can release residual charge between a semiconductor wafer and the electrostatic chuck even without the presence of plasma. Therefore, since the lift pin can be raised immediately after de-chucking, treatment time per wafer sheet is reduced.

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first porous part. The ceramic dielectric substrate includes first and second major surfaces. The second major surface is opposite to the first major surface. The base plate supports the ceramic dielectric substrate and includes a gas feed channel. The first porous part is provided in the ceramic dielectric substrate and is opposite to the gas feed channel. The first porous part includes a first porous region, and a first dense region denser than the first porous region. The first porous region includes first sparse portions, and a first dense portion. The first sparse portions include pores. The first dense portion has a higher than the first sparse portions. The first dense portion is positioned between the first sparse portions. The first sparse portions include a first wall part provided between the pores.

Abstract: A surge arrester includes a polymer body including a first leg having a first channel defined therein and a second leg perpendicular to the first leg and having a second channel defined therein. A varistor assembly is in the first channel. The varistor assembly includes a plurality of varistor elements electrically connected in series and forming a stack of the plurality of varistor elements. The stack has a first end surface, a second end surface, and an outer side surface extending between the first end surface and the second end surface. The varistor assembly includes a first end fitting at the first end surface of the stack, a second end fitting at the second end surface of the stack, a plurality of rods disposed around the side surface of the stack, and a polymer fill layer between the side surface of the stack and the first leg of the body.

Abstract: Disclosed is an integrated thermal and electrical system with self-regulating capabilities to provide enhanced cooling capacity and auxiliary power. The system includes two cooling loops, a primary cooling loop whose cooling capacity is fixed and a secondary cooling loop that supplements the primary cooling loop when the cooling capacity of the primary cooling loop is insufficient. The two cooling loops may use a phase change fluid whose vapor pressure is monitored to control the cooling capacity of the secondary cooling loop to respond to fluctuating thermal load. The system includes two types of energy sources such as a photovoltaic system and a power storage. The photovoltaic system may power the secondary cooling loop to control the fluid flow rate or the airflow rate through the secondary cooling loop based on the vapor pressure. The photovoltaic system may charge the power storage when not powering the secondary cooling loop.