Patents Examined by Stephan Gordon
  • Process and apparatus for transferring an object and for processing semiconductor wafers
    Patent number: 5478195
    Abstract: Apparatus for processing semiconductor wafers includes a load lock chamber with a first gate valve and a second gate valve so as to load and unload cassettes through the first gate valve, and to convey the wafers from the load lock chamber to a plurality of processing chambers through respective second valves. The load lock chamber is provided with a turntable which holds the plurality of cassettes. The turntable conveys each of the cassettes in front of respective ones of the second valves.
    Type: Grant
    Filed: December 3, 1992
    Date of Patent: December 26, 1995
    Assignee: Hitachi, Ltd.
    Inventor: Yasutsugu Usami