Patents Examined by Sujoy Kundo
  • Apparatus and method for inspecting semiconductor device
    Patent number: 7065460
    Abstract: An image of the shape of a semiconductor wafer is displayed on a display apparatus for displaying an inspection result of a semiconductor device, and a different color or pattern is displayed for each inspection result as display information indicating the inspection result of a semiconductor device in a region corresponding to the semiconductor device on the image of the semiconductor wafer.
    Type: Grant
    Filed: September 16, 2004
    Date of Patent: June 20, 2006
    Assignee: Matsushita Electric Industrial Co., Inc.
    Inventor: Satoru Nishimura