Patents Examined by Susan E. S. McBee
  • Copolymers having O-nitrocarbinol ester groups and production of semiconductor components
    Patent number: 4822866
    Abstract: Copolymers containing from 5 to 50 mol % of monomers having o-nitrocarbinol ester groups, from 94 to 30 mol % of methacrylonitrile, from 1 to 20 mol % of olefinically unsaturated copolymerizable carboxylic acid and from 0 to 30 mol % of other copolymerizable monomers as copolymerized units are useful for fabricating semiconductor components.
    Type: Grant
    Filed: January 12, 1988
    Date of Patent: April 18, 1989
    Assignee: BASF Aktiengesellschaft
    Inventors: Reinhold Schwalm, Horst Binder