Patents Examined by T. Ha Nguyen
  • Patent number: 6690569
    Abstract: A sensor, in particular a humidity sensor, comprises a measuring layer (4), the dielectric properties of which depend on a parameter to be measured, e.g. of the humidity of the environmental air. Electrodes (2, 3) are arranged on a substrate (1) side by side for capacitively measuring the measuring layer (1). A protective layer (8) of a non-oxidizing material, in particular a layer of silicon oxide or gold, is arranged between the electrodes (2, 3) and the measuring layer (4). This layer prevents an oxidation of the electrodes (2, 3) and increases the live time and reliability of the sensor.
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: February 10, 2004
    Assignee: Sensirion A/G
    Inventors: Felix Mayer, Moritz Lechner