Abstract: An interferometer of the present invention includes a PBS2 which splits light into reference light and measurement light, a reference mirror which reflects the reference light entering the reference mirror from a first direction, a measurement mirror which reflects the measurement light entering the measurement mirror from a second direction, a lens system which reflected lights from the reference mirror and the measurement light enter, a reflective device which reflects light from the lens system, and a light receiving device which receives multiplexed light, wherein the reference mirror and the measurement mirror are in a conjugate relation with respect to the reflective device, and at least one of the reference mirror and the measurement mirror is tilted so that its normal direction differs from the first and the second direction.

Abstract: In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, on the light detecting element 5, a first pool portion 101 is formed so as to be located at least between the light detecting portion 5a and the light passing hole 50 when viewed from a direction substantially perpendicular to the front plane 2a.

Abstract: A structured light sensor system for measuring contour of a surface includes an imaging lens system, an image capturing device, a first set of micro electromechanical system (MEMS) mirrors, and a control module. The imaging lens system focuses light reflected from the surface, wherein the imaging lens system has a corresponding lens plane. The image capturing device captures the focused light and generates data corresponding to the captured light, wherein the image capturing device has a corresponding image plane that is not parallel to the lens plane. The first set of MEMS mirrors direct the focused light to the image capturing device. The control module receives the data, determines a quality of focus of the captured light based on the received data, and controls the first set of MEMS mirrors based on the quality of focus to maintain a Scheimpflug tilt condition between the lens plane and the image plane.

Abstract: Monitoring the functioning and/or adjustment of an optoelectronic sensor arrangement (10) exhibiting at least two optical transmitters (S1, S2, S3), to each of which a laterally-resolving optical receiver is assigned, such that each of the optical transmitters (S1, S2, S3) and the corresponding optical receivers (E1, E2, E3) are so positioned relative to each other that a light ray (L1a, L2a, L3a) emitted from the optical transmitter (S1, S2, S3) can be detected by the corresponding optical receiver (E1, E2, E3) after being reflected by a boundary surface (F), which process involves the following steps: a) detecting the current position-proportional reception values for each optical transmitter (S1, S2, S3) and corresponding optical receiver (E1, E2, E3), b) determining the current relative positions for the reception values of any two adjacent optical transmitters (S1, S2, S3), p0 c) comparing the current relative positions for the reception values with stored reference values.

Abstract: A method for determining the centrality of masks is disclosed. The mask is positioned in a coordinate measuring device on a measurement table displaceable in a direction perpendicular to the optical axis of an imaging measurement system in an interferometrically measurable way. The position of a mask coordinate system with respect to the measuring device coordinate system is determined based on at lest two structures on the mask. The relative distance from one of the at least first and second outer edges to the at least two structures is determined. The coordinate measuring machine determines the actual coordinates of the at least two structures with respect to the respective outer edges, which must not exceed a predetermined deviation from a desired value.

Abstract: A sensor for identifying at least one particle by means of Raman-spectroscopy, comprising an optical trapping system for the at least one particle, including a laser-beam source, acting further as a Raman excitation source for the at least one particle, and a Raman-spectrometer for measuring the spectrally modified light scattered by the at least one particle and for identifying same, wherein the optical trapping system comprises a photonic crystal directly linked with the laser-beam source, which photonic crystal has multiple cavities at predetermined positions, and wherein the laser-beam source in use resonantly excites one or more predetermined electromagnetic modes of the cavities at said positions for trapping and Raman-exciting the at least one particle.

Abstract: A method for determining the position of an edge bead removal line of a disk-like object having an edge area and an alignment mark on the edge area is disclosed, wherein the edge area including the edge bead removal line is imaged on a line-by-line basis, an intensity profile I of the imaged edge area including the edge bead removal line is obtained with a camera on a line-by-line basis, and the edge area and the alignment mark are detected, wherein the local intensity maxima I?max of the intensity profile I are plotted as points in a diagram, segment sets are formed in the diagram, the segment sets are fitted in ellipses, and a quality criterion qges is determined for each ellipse.

Abstract: Rotary encoder apparatus is described that comprises one or more readheads and a radial scale. Each of the one or more readheads includes a light emitting portion for illuminating the radial scale and a light detecting portion for detecting interference fringes formed at a readhead analyzer plane. The readhead analyzer plane is tilted relative to the plane containing the radial scale. In a preferred embodiment, the readhead analyzer plane is tilted towards the center of rotation of the rotary encoder apparatus by the angle.