Abstract: A device for interferential distance measurement that includes a light source that emits a light beam along a propagation direction and a scanning plate including a splitter that splits the light beam into a measurement beam and a reference beam. The device further including a reflector disposed spaced-apart in a direction of the propagation direction and a detector element. The measurement beam and the reference beam are propagated from the splitter along different optical paths toward the reflector, where a back reflection of the measurement beam and the reference beam occurs at the reflector toward the scanning plate. In addition, at a combining location the measurement beam and the reference beam attain interfering superposition, and wherein the measurement beam and the reference beam interfering at the combining location are detected by the detector element so that the detector element generates a distance signal regarding a distance between the scanning plate and the reflector.
Type:
Grant
Filed:
March 21, 2011
Date of Patent:
July 14, 2015
Assignee:
DR. JOHANNES HEIDENHAIN GmbH
Inventors:
Walter Huber, Birgit Lange, Michael Hermann
Abstract: A method and a device for generating and for detecting a Raman spectrum enables an automated, or automatable, and at the same time quantitative SERD spectroscopy (for example concentration measurement series). To this end, during the SERD spectroscopy, a first spectrum and a second spectrum are standardized in relation to one another in terms of intensity values and a first difference spectrum is subsequently calculated, a second difference spectrum is calculated, the first difference spectrum is converted into a first transformation spectrum, the second difference spectrum is converted into a second transformation spectrum, and the Raman spectrum is calculated by adding the first transformation spectrum and the second transformation spectrum.