Patents Examined by Terry J. Ownes
  • Apparatus for vaporizing monomers that flow at room temperature
    Patent number: 4947789
    Abstract: An evaporator chamber has an entry end with a conduit connected to the output of a mass flow regulator, an exit end connected to a vacuum, and a wall surface extending therebetween. A body having capillary action is disposed in the chamber and has one end connected to the conduit and a free surface spaced from the wall surface in line of sight thereof. Heating means for the wall surface heats the body radiantly and causes monomer carried thereby to evaporate.
    Type: Grant
    Filed: November 4, 1988
    Date of Patent: August 14, 1990
    Assignee: Leybold Aktiengesellschaft
    Inventors: Ingo Hussla, Jochen Ritter