Abstract: A semiconductor interconnection consists of a corrosion resistant integrated fuse and Controlled, Collapse Chip Connection (C4) structure for the planar copper Back End of Line (BEOL). Non copper fuse material is directly connected to copper wiring.
Type:
Grant
Filed:
September 9, 1997
Date of Patent:
August 18, 1998
Assignee:
International Business Machines Corporation
Inventors:
William Thomas Motsiff, Robert Michael Geffken, Ronald Robert Uttecht