Patents Examined by Thanhha S. Pham
  • Patent number: 11980020
    Abstract: The present disclosure relates to the technical field of semiconductor manufacturing, and provides a semiconductor structure and a forming method thereof. The forming method includes: providing a semiconductor substrate, where a surface of the semiconductor substrate is provided with a plurality of conductive structures arranged at intervals; forming sidewall dielectric layers on surfaces of the conductive structures, and then depositing sequentially and alternately to form at least two supporting layers and sacrificial layers; etching the supporting layers and the sacrificial layers to form contact holes exposing the surfaces of the conductive structures; and forming an electrode layer on surfaces of the contact holes.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: May 7, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Yong Lu
  • Patent number: 11973067
    Abstract: Methods for manufacturing a display device are provided. The methods include providing a plurality of light-emitting units and a substrate. The methods also include transferring the light-emitting units to a transfer head. The methods further include attaching at least one of the plurality of light-emitting units on the transfer head to the substrate by a bonding process, wherein the transfer head and the substrate satisfy the following equation during the bonding process: 0 ? ? ? T ? ? 1 T ? ? 2 ? A ? ( T ) ? dT - ? T ? ? 1 T ? ? 3 ? E ? ( T ) ? dT ? ? < 0.01 wherein A(T) is the coefficient of thermal expansion of the transfer head, E(T) is the coefficient of thermal expansion of the substrate, T1 is room temperature, T2 is the temperature of the transfer head, and T3 is the temperature of the substrate.
    Type: Grant
    Filed: August 24, 2021
    Date of Patent: April 30, 2024
    Assignee: INNOLUX CORPORATION
    Inventors: Tung-Kai Liu, Tsau-Hua Hsieh, Fang-Ying Lin, Kai Cheng, Hui-Chieh Wang, Shun-Yuan Hu
  • Patent number: 11967527
    Abstract: Methods of forming fully aligned vias connecting two metal lines extending in two directions are described. The fully aligned via is aligned with the first metal line and the second metal line along both directions. A third metal layer is patterned on a top of a second metal layer in electrical contact with a first metal layer. The patterned third metal layer is misaligned from the top of the second metal layer. The second metal layer is recessed to expose sides of the second metal layer and remove portions not aligned sides of the third metal layer.
    Type: Grant
    Filed: June 18, 2022
    Date of Patent: April 23, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: He Ren, Hao Jiang, Mehul Naik
  • Patent number: 11967548
    Abstract: An assembly includes a chip including an integrated circuit, a casing including an integrated circuit and having an upper portion formed on a side of the chip and lower portion formed on another side of the chip, plural through-wafer vias (TWVs) for electrically connecting the integrated circuit of the chip and the integrated circuit of the casing, a system board configured to be electrically connected to the casing, and upper and lower cards connected to the casing for electrically connecting the casing to the system board.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: April 23, 2024
    Assignee: International Business Machines Corporation
    Inventors: Kerry Bernstein, Thomas Brunschwiler, Bruno Michel
  • Patent number: 11961798
    Abstract: A semiconductor structure and a method for manufacturing a semiconductor structure are provided. The semiconductor structure includes at least two electrode layers, and the electrode layers are parallel to each other and arranged in different layers. Adjacent electrode layers overlap with each other and have an overlapping area, a dielectric layer is arranged between the adjacent electrode layers, and an air gap is arranged in the dielectric layer located in the overlapping area.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: April 16, 2024
    Assignee: Changxin Memory Technologies, Inc.
    Inventor: Ping-Heng Wu
  • Patent number: 11961877
    Abstract: A device includes, in a first region, a first conductive interconnect, an electrode structure on the first conductive interconnect, where the electrode structure includes a first conductive hydrogen barrier layer and a first conductive fill material. A trench capacitor including a ferroelectric material or a paraelectric material is on the electrode structure. A second dielectric includes an amorphous, greater than 90% film density hydrogen barrier material laterally surrounds the memory device. A via electrode including a second conductive hydrogen barrier material is on at least a portion of the memory device. A second region includes a conductive interconnect structure embedded within a less than 90% film density dielectric material.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: April 16, 2024
    Assignee: KEPLER COMPUTING INC.
    Inventors: Somilkumar J. Rathi, Noriyuki Sato, Niloy Mukherjee, Rajeev Kumar Dokania, Amrita Mathuriya, Tanay Gosavi, Pratyush Pandey, Jason Y. Wu, Sasikanth Manipatruni
  • Patent number: 11955469
    Abstract: A micro LED display panel includes a blue LED layer, a green LED layer, and a red LED layer. The blue LED layer, the green LED layer, and the red LED layer are in a stacked formation. The blue, the green, and the red LED layers each include a plurality of micro LEDs spaced apart from each other. The composition of the layers is such that light emitted from all but the bottom layer is able to pass through transparent material in other layers before exiting the panel and being viewed.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: April 9, 2024
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Wei-Chih Chang, Chung-Wen Lai
  • Patent number: 11955512
    Abstract: A device includes, in a first region, a first conductive interconnect, an electrode structure on the first conductive interconnect, where the electrode structure includes a first conductive hydrogen barrier layer and a first conductive fill material. A trench capacitor including a ferroelectric material or a paraelectric material is on the electrode structure. A second dielectric includes an amorphous, greater than 90% film density hydrogen barrier material laterally surrounds the memory device. A via electrode including a second conductive hydrogen barrier material is on at least a portion of the memory device. A second region includes a conductive interconnect structure embedded within a less than 90% film density dielectric material.
    Type: Grant
    Filed: December 15, 2021
    Date of Patent: April 9, 2024
    Assignee: Kepler Computing Inc.
    Inventors: Somilkumar J. Rathi, Noriyuki Sato, Niloy Mukherjee, Rajeev Kumar Dokania, Amrita Mathuriya, Tanay Gosavi, Pratyush Pandey, Jason Y. Wu, Sasikanth Manipatruni
  • Patent number: 11948879
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a device, a first dielectric material disposed over the device, and an opening is formed in the first dielectric material. The semiconductor device structure further includes a conductive structure disposed in the opening, and the conductive structure includes a first sidewall. The semiconductor device structure further includes a surrounding structure disposed in the opening, and the surrounding structure surrounds the first sidewall of the conductive structure. The surrounding structure includes a first spacer layer and a second spacer layer adjacent the first spacer layer. The first spacer layer is separated from the second spacer layer by an air gap.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11948868
    Abstract: Generally described, one or more embodiments are directed to a leadframe package having a plurality of leads, a die pad, a semiconductor die coupled to the die pad, and encapsulation material. An inner portion of the die pad includes a perimeter portion that includes a plurality of protrusions that are spaced apart from each other. The protrusions aid in locking the die pad in the encapsulation material. The plurality of leads includes upper portions and base portions. The base portion of the plurality of leads are offset (or staggered) relative to the plurality of protrusions of the die pad. In particular, the base portions extend longitudinally toward the die pad and are located between respective protrusions. The upper portions of the leads include lead locks that extend beyond the base portions in a direction of adjacent leads. The lead locks and the protrusion in the die pad aid in locking the leads and the die pad in the encapsulation material.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: April 2, 2024
    Assignee: STMICROELECTRONICS, INC.
    Inventor: Jefferson Talledo
  • Patent number: 11943931
    Abstract: In one embodiment, a non-volatile memory device includes a vertical state transistor disposed in a semiconductor substrate, where the vertical state transistor is configured to trap charges in a dielectric interface between a semiconductor well and a control gate. A vertical selection transistor is disposed in the semiconductor substrate. The vertical selection transistor is disposed under the state transistor, and configured to select the state transistor.
    Type: Grant
    Filed: April 1, 2021
    Date of Patent: March 26, 2024
    Assignee: STMicroelectronics (Rousset) SAS
    Inventors: Quentin Hubert, Abderrezak Marzaki, Julien Delalleau
  • Patent number: 11943938
    Abstract: A method for manufacturing a 3D vertical array of memory cells is disclosed. The method comprises: forming on a substrate a stack of dielectric material layers comprising first and second dielectric material layers alternated to each other; forming holes through the stack of dielectric material layers, said holes exposing the substrate; selectively removing the second material layers through said holes to form cavities between adjacent first dielectric material layers; filling said cavities with a conductive material through said holes to form corresponding conductive material layers; forming first memory cell access lines from said conductive material layers; carrying out a conformal deposition of a chalcogenide material through said holes; forming memory cell storage elements from said deposed chalcogenide material; filling said holes with conductive material to form corresponding second memory cell access lines.
    Type: Grant
    Filed: March 18, 2020
    Date of Patent: March 26, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Fantini, Lorenzo Fratin, Paolo Tessariol
  • Patent number: 11935786
    Abstract: A method of fabricating a semiconductor device includes recessing an upper portion of a first dielectric layer disposed over a conductive feature. The method includes filling the recessed upper portion with a second dielectric layer to form a void embedded in the second dielectric layer. The method includes etching the second dielectric layer and the first dielectric layer to form a contact opening that exposes at least a portion of the conductive feature using the void to vertically align at least a lower portion of the contact opening with the conductive feature. The method includes filling the contact opening with a conductive material to form a contact feature electrically coupled to the conductive feature.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: March 19, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsui-Ling Yen, Chien-Hung Chen
  • Patent number: 11935782
    Abstract: A method of forming a structure comprises forming a pattern of elongate features extending vertically from a base structure. Conductive material is formed on the elongate features. After completing the forming of the pattern of elongate features, the elongate features, the conductive material, or both is (are) exposed to at least one surface treatment gas. The at least one surface treatment gas comprises at least one species formulated to diminish attractive or cohesive forces at a surface of the conductive material. Apparatus and additional methods are also described.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: March 19, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Marko Milojevic, John A. Smythe, Timothy A. Quick, Sumeet C. Pandey
  • Patent number: 11935818
    Abstract: A method of producing electronic components including at least one circuit having coupled therewith electrical connections including metallic wire bondable surfaces encased in a packaging, the method including bonding stud bumps, in particular copper stud bumps, at determined areas of said wire bondable surfaces.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: March 19, 2024
    Assignee: STMICROELECTRONICS S.r.l.
    Inventor: Fabio Marchisi
  • Patent number: 11916013
    Abstract: Interconnect structures including super vias are formed during back-end-of-line processing using sacrificial placeholders to protect the bottom portions of the super vias while upper portions of the super vias are formed. The sacrificial placeholders are removed and replaced by metal conductors that fill the bottom and upper portions of the super vias.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: February 27, 2024
    Assignee: International Business Machines Corporation
    Inventors: Yann Mignot, Christopher J. Waskiewicz, Eric Miller, Chanro Park
  • Patent number: 11908796
    Abstract: A semiconductor device includes a substrate, a first metal layer, a dielectric layer, and a second metal layer. The substrate includes a dense region and an isolation region. The first metal layer is disposed over the substrate and includes a first metal pattern and a second metal pattern. The first metal pattern is located in the dense region. There is at least one slot in the first metal pattern. The second metal pattern is located in the isolation region. The dielectric layer is disposed on the first metal layer. The second metal layer is disposed on the dielectric layer.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yu Tseng, Wei-Lun Hu
  • Patent number: 11908779
    Abstract: A semiconductor package structure includes a substrate comprising a land structure. The land structure includes a first land section having a first height in a cross-sectional view and a second land section having a second height in the cross-sectional view that is different than the first height. A mold encapsulant is disposed adjacent a lateral portion of the first land section and is disposed below a bottom portion of the second land section. A semiconductor die is attached to the substrate, and includes a first major surface, a second major surface opposing the first major surface, and an outer perimeter. The semiconductor die further includes a bonding structure disposed adjacent the first major surface, which is coupled to the second land section such that the first land section is disposed outside the perimeter of the semiconductor die A mold member encapsulates at least portions of the semiconductor die.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: February 20, 2024
    Assignee: Amkor Technology Singapore Holding Pte. Ltd.
    Inventors: Kyoung Yeon Lee, Byong Jin Kim, Jae Min Bae, Hyung Il Jeon, Gi Jeong Kim, Ji Young Chung
  • Patent number: 11901225
    Abstract: Exemplary methods of plating are described. The methods may include contacting a patterned substrate with a plating bath in a plating chamber. The patterned substrate includes at least one metal interconnect with a contact surface that is exposed to the plating bath. The metal interconnect is made of a first metal characterized by a first reduction potential. The methods further include plating a diffusion layer on the contact surface of the metal interconnect. The diffusion layer is made of a second metal characterized by a second reduction potential that is larger than the first reduction potential of the first metal in the metal interconnects. The plating bath also includes one or more ions of the second metal and a grain refining compound that reduces the formation of pinhole defects in the diffusion layer.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: February 13, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Eric J. Bergman, John L. Klocke, Marvin L. Bernt, Prayudi Lianto
  • Patent number: 11894376
    Abstract: An integrated circuit device includes: a plurality of channel regions spaced apart from each other in an active region; a plurality of source/drain regions; an insulating structure on the active region, the insulating structure defining a plurality of gate spaces; a first gate stack structure in a first of the gate spaces, the first gate stack structure including a first work function metal-containing layer; and an isolation stack structure in a second of the gate spaces that is adjacent the first of the gate spaces, the isolation stack structure having a different stack structure from the first gate stack structure and being configured to electrically isolate a portion of the active region.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: February 6, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dae-Won Ha, Byoung-Hak Hong