Abstract: A method of fabricating an electronic component includes forming a functional unit on a main surface of a substrate, forming a sacrificial layer covering the functional unit on the main surface, forming a cap layer covering the sacrificial layer, the cap layer forming a periphery enclosing the cavity on the main surface, forming holes through the cap layer, forming a cavity by removing the sacrificial layer using a wet etching process through the holes, the holes including a peripheral hole communicating an inside of the cavity with an outside of the cavity along the main surface, and forming a first resin layer covering the cap layer and the main surface.

Abstract: The present disclosure relates to a Wafer-level-packaged Bulk Acoustic Wave (BAW) device, which includes a bottom electrode, a top electrode, a top electrode lead, a piezoelectric layer sandwiched between the bottom and the top electrodes, an enclosure, and an anti-reflective layer (ARL). Herein, an active region for a resonator is formed where the bottom electrode and the top electrode overlap. The top electrode lead is over the piezoelectric layer and extending from the top electrode. The enclosure includes a cap and an outer wall that extends from the cap toward the piezoelectric layer to form a cavity. The top electrode resides in the cavity and a first portion of the outer wall resides over the top electrode lead. The ARL, with a reflectance less than 40% R, is between the first portion of the outer wall and the top electrode lead.

Abstract: A transducer comprising: at least one piezoelectric layer; a first patterned conductive layer that is patterned with a first opening; a second patterned conductive layer that is patterned with a second opening; wherein at least one piezoelectric layer is between the first and the second patterned conductive layers in a stack; and wherein a position of the first opening is staggered relative to a position of the second opening in the stack to mitigate an occurrence of crack propagation through the layers.

Abstract: The present invention relates a power ultrasound device for fluids processing. An ultrasonic resonator comprises: an exciter section having a longitudinal axis and dimensioned to be resonant in a direction along the longitudinal axis when the exciter section is energized with high frequency vibrations; and a radiator section having a connection stub and coupled to the exciter section through the connection stub, wherein the radiator section is configured to receive the vibrations from the exciter section and transmit the vibrations as acoustic waves, wherein an axial length of the exciter section is less than a half-wavelength, wherein the connection stub completes the half-wavelength when coupled to the excited section to allow the ultrasonic resonator operate in resonance at design frequency.

Abstract: A transducer that converts electrical energy to mechanical energy, the transducer includes a dielectric layer; a first electrode that is provided on one surface of the dielectric layer; and a second electrode that is provided on another surface of the dielectric layer. At least one of the first electrode and the second electrode becomes an insulator, before the dielectric layer suffers insulation breakdown by voltage that is applied between the first electrode and the second electrode.

Abstract: An ultrasonic surgical tool system with a tip capable of simultaneously vibrating in plural modes. The system includes a console capable of supplying a drive signal to the tip that includes plural components. Each component has a frequency characteristic that is based in part on the equivalent of current through the mechanical components of the tip. The frequency components are different from each other. Based on the application of drive signal the tip undergoes non-linear vibrations.

Abstract: A rotary system mounted piezoelectric generator has a folded beam structure in which the whole or part of a spring is formed with a piezoelectric generation element, in which one end is provided in a drive rotation system and in which a weight is attached to the other end, the degree of freedom of motion of the weight is two or more-dimensional and thus it is possible to easily change the locus thereof. The beam has a spiral structure such that when the drive rotation system is rotated, a centrifugal force applied to the weight is efficiently modulated by a second force other than the centrifugal force. A self-powered wireless communication terminal is operated with an extremely small amount of power consumption by use of a wireless connection control means and a modulation scattering response antenna which perform multilevel phase-shift keying (MPSK).

Abstract: A bulk acoustic wave filter device and method thereof includes a first layer forming an air gap together with a substrate, a lower electrode disposed over the first layer, a piezoelectric layer disposed to cover a portion of the lower electrode, an upper electrode disposed over the piezoelectric layer, a frame layer disposed below the upper electrode, and a lower electrode reinforcing layer disposed on the lower electrode, other than portions in which the piezoelectric layer is disposed. The lower electrode reinforcing layer is formed by separating the lower electrode reinforcing layer from the upper electrode or the frame layer upon one of the upper electrode and the frame layer being formed.

Abstract: A self-powered piezoelectric energy harvesting microsystem device has CMOS integrated circuit elements, contacts and interconnections formed at a proof mass portion of a die region of a semiconductor wafer. Piezoelectric energy harvesting unit components connected to the integrated circuit elements are formed at a thinned beam portion of the die region that connects the proof mass portion for vibration relative to a surrounding anchor frame portion. A battery provided on the proof mass portion connects to the integrated circuit elements. In a cantilever architectural example, the battery is advantageously located at a distal end of the proof mass portion, opposite the joinder with frame portion via the beam portion.

Abstract: There is provided a power generating element which is capable of converting vibration energy in various directions into electric energy without waste and less likely to be damaged even upon application of excessive vibration. Made available is a main generating structure (MGS) in which a first layer (100), a second layer (200) and a third layer (300) are laminated. The second layer (200) has a plate-like bridge portion (210), a central plate-like portion (220), a left-hand side plate-like portion (230) and a right-hand side plate-like portion (240), each of which is flexible, and the third layer (300), that is a weight body, formed in the “U” letter shape is joined with the lower surface thereof. The plate-like bridge portion (210) is protected by the weight body (300) circumference thereof.

Abstract: An acoustic resonator and a method of manufacturing the same are provided. The acoustic resonator includes a resonating part including a first electrode, a second electrode, and a piezoelectric layer; and a plurality of seed layers disposed on one side of the resonating part.

Abstract: An ultrasonic motor includes an annular vibrator and an annular moving member that is brought into pressure-contact with the vibrator. The vibrator includes an annular vibrating plate and an annular piezoelectric element. The piezoelectric element includes an annular lead-free piezoelectric ceramic piece, a common electrode arranged on one surface of the piezoelectric ceramic piece, and a plurality of electrodes arranged on the other surface of the piezoelectric ceramic piece. The plurality of electrodes include two drive phase electrodes, one or more non-drive phase electrodes, and one or more detection phase electrodes. A second surface of the vibrating plate includes a plurality of groove regions extending radially, and the depths of the groove regions change in a circumferential direction along a curve obtained by superimposing one or more sine waves on one another. The ultrasonic motor exhibits a sufficient drive speed while suppressing generation of an unnecessary vibration wave.

Abstract: A method includes transmitting a focused ultrasound wave into a medium to form (i) an ultrasound intensity well within the medium that exhibits a first range of acoustic pressure and (ii) a surrounding region of the medium that surrounds the ultrasound intensity well and exhibits a second range of acoustic pressure that exceeds the first range of acoustic pressure. The method further includes confining an object within the ultrasound intensity well. Additionally, an acoustic lens is configured to be acoustically coupled to an acoustic transducer. The acoustic lens has a varying longitudinal thickness that increases proportionally with respect to increasing azimuth angle of the acoustic lens. Another acoustic lens is configured to be acoustically coupled to an acoustic that increases proportionally with respect to increasing azimuth angle of the segment.

Abstract: A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.

Abstract: An acoustic wave device that utilizes a plate wave includes a recess in an upper surface of a support substrate. A piezoelectric substrate is located on the support substrate with a first principal surface side facing the support substrate. An IDT electrode is provided on the first principal surface of the piezoelectric substrate. The recess defines a cavity that is surrounded by the support substrate and the first principal surface of the piezoelectric substrate. The IDT electrode faces the cavity. The piezoelectric substrate includes through-holes that communicate the cavity and the second principal surface with each other. Sealing materials are filled respectively in the through-holes.

Abstract: A vibration-type actuator capable of suppressing reduction in holding torque or holding force under influence of humidity. A vibration-type actuator 10 includes a vibrating body 2 and a driven body 1. The vibrating body 2 has a piezoelectric element 2c and an elastic body 2b. The driven body 1 is in contact with the vibrating body 2. The vibration-type actuator 10 moves the vibrating body 2 and the driven body 1 relatively to each other by vibration excited to the vibrating body 2. At least one of a first contact portion of the vibrating body 2 and a second contact portion of the driven body 1 includes a stainless-steel sintered body with pores and at least some of the pores are impregnated with a resin.

Abstract: A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

Abstract: A method for manufacturing a quartz crystal resonator that includes a quartz crystal blank having a vibrating portion including a center of a principal surface of the quartz crystal blank when viewed in plan from a direction normal to the principal surface and a peripheral portion adjacent to the vibrating portion, a pair of excitation electrodes disposed opposite to each other with the vibrating portion interposed therebetween, a pair of electrode pads disposed on the peripheral portion, and a pair of extended electrodes each extending from the vibrating portion to the peripheral portion to electrically connect one excitation electrode to a corresponding electrode pad, where the method includes conducting a first trimming of the vibrating portion and the peripheral portion; and conducting a second trimming of part of one of the excitation electrodes on the vibrating portion.

Abstract: An inkjet printing head includes a piezoelectric element having a lower electrode, a piezoelectric film formed above the lower electrode, and an upper electrode formed above the piezoelectric film, a hydrogen barrier film covering an entirety of a side surface of the upper electrode and the piezoelectric film, and an interlayer insulating film that has an opening at an upper surface center of the upper electrode, is laminated on the hydrogen barrier film, and faces the entirety of the side surface of the upper electrode and the piezoelectric film across the hydrogen barrier film.

Abstract: A microelectromechanical apparatus for generating a physical effect, including an array of moving elements, each coupled to a mechanical support by at least one flexure which is associated with at least one piezoelectric member which is operable to be strained by an electrical field applied to the piezoelectric member, thereby flexing the flexure to which the piezoelectric member is coupled; an electrical wiring, including a group of electrodes, wherein each electrode out of the group of electrodes is coupled to at least one of the piezoelectric members; wherein the electrical wiring is operable to concurrently transfer different sequences of electric fields to different piezoelectric members, thereby controllably inducing movement of moving elements of the array for creating the physical effect; and a motion restriction mechanism for maintaining a maximal motion distance for each of the moving elements when actuated via the corresponding flexure and piezoelectric member.