Abstract: A gas sensor for detecting a physical and/or chemical value of an analysis gas, a corresponding manufacturing method, and operating method. The gas sensor is based on the principle of a thermal conductivity measurement with the aid of a sensor structure including a double meander structure made up of two resistor lines, as part of a Wheatstone bridge circuit, on a diaphragm of a substrate. The two resistor lines are energized in opposite directions as a function of the detected temperature. The physical and/or chemical value(s) of the analysis gas are/is subsequently determined as a function of the voltages detected at the double meander structure.
Type:
Grant
Filed:
January 5, 2023
Date of Patent:
October 14, 2025
Assignee:
ROBERT BOSCH GMBH
Inventors:
Helmut Grutzeck, Renate Mueller, Stefan Zehringer