Patents Examined by Timothy J. Joran
  • Oxide thin film for a bolometer, process for producing the same, and infrared sensor using the same
    Patent number: 6713763
    Abstract: A thin film made of a cobalt-based oxide represented by YBaCo2O5.5+x (−0.5<x<0.05) is used as a resistor material for a bolometer. Provided is also an infrared sensor having a microbridge structure and using the cobalt-based oxide thin film. The temperature coefficient of the electric resistance thereof can be made large.
    Type: Grant
    Filed: November 7, 2001
    Date of Patent: March 30, 2004
    Assignee: NEC Corporation
    Inventors: Tsutomu Yoshitake, Hideto Imai