Abstract: Method for organic free radical, including aliphatic radical, transport of dopant species for precise, predetermined, and reproducible doping concentrations to control electrical properties for chemical vapor deposition grown materials.
Type:
Grant
Filed:
February 19, 1991
Date of Patent:
April 13, 1993
Assignee:
Rockwell International Corporation
Inventors:
Charles R. Younger, Kenneth L. Hess, Stuart J. C. Irvine, Edward R. Gertner, Shawn L. Johnston