Abstract: A CVD mechanism includes a reactor, a substrate holder, a heating apparatus for heating the substrate holder, a reaction gas supply plate for supplying reaction gas into the reactor, and at least two cylinders disposed in a concentric form on the substrate-facing surface of the reaction gas supply plate so that reaction gas is supplied from an inward portion of each cylinder in the reaction gas supply plate. A power supply mechanism for supplying power to the reaction gas supply plate and the substrate holder, and ring magnets disposed in the upper and lower portions of the reactor are provided so that magnetic lines of force passing through a plasma space are generated by the facing magnetic pole parts of the respective magnets.

Abstract: An apparatus for generating plasma is disclosed. The apparatus comprises: a plasma chamber; pairs of parallel plate electrodes; and a power supply for applying high-frequency powers on the pairs of electrodes. The frequencies of the high-frequency powers and the phase difference between the high-frequency powers are adjusted so as to cause each of electrons in the plasma to move in a circular path. A dense and highly uniform plasma is generated at a low pressure level, by utilizing the phenomenon of the oscillation, revolution or cycloidal motion of electrons in a high-frequency electric field formed between the parallel plate electrodes. This plasma is suitable for etching in the LSI fabrication process.

Abstract: A plasma reactor for performing an etching or deposition method, said reactor including a vacuum enclosure designed to receive a substrate to be treated, and including means for inserting a gas to be ionized, the plasma, which is produced in a container, being excited by an antenna fed by a radio-frequency power generator, wherein said antenna is composed of an electrical conductor that constitutes a single circular loop having two diametrically-opposite points connected to feed conductors.

Abstract: A combined mouse and track ball are contained within an ergonomically designed housing or shell. The shell is curved to fit comfortably within the palm of the hand of an operator so that the forefinger and thumb are opposed to each other in a prehensile position. A single shell is operable by a left-handed or right-handed operator by rotation of a switch to change the alignment of the sensor pickups engaging the roller ball of the combined mouse and track ball. At least one switch plate extends across an upper surface of the shell for depression by a forefinger of the operator. The switch plate is pivoted about a central fulcrum so as to have a cursor shifted to a position above an icon located on a computer screen for depression of the switch plate and initiation of the computer function indicated.

Abstract: A touch screen display is automatically calibrated during periods of active use or extended periods of non-use. Calibration contacts are cemented or embedded to the surface of a touch sensitive panel, and electrically connected to a reference during calibration. The reference is either electrical ground or a resistive, capacitive, or inductive load.