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Patents
Patents Examined by V. Dang
Patents Examined by V. Dang
Deposition technique
Patent number:
4645689
Abstract:
Devices such as photodiodes based on III-V semiconductor materials have been made utilizing a CVD epitaxial procedure. This procedure includes, for example, the use of a combination of liquid and solid chloride transport sources.
Type:
Grant
Filed:
September 3, 1985
Date of Patent:
February 24, 1987
Assignee:
AT&T Bell Laboratories
Inventor:
Herbert M. Cox