Abstract: A positioner, such as a test head carrier for a semiconductor wafer and device tester, includes a vertical support and a main arm for supporting a test head. The main arm is suspended for vernier movement by use of a counterbalancing force such as counterweights. The suspension of the main arm is performed at a mechanical advantage so that reduced counter-blancing force and correspondingly large movements on the counterblance side are used to effect the vernier movement. The vertical support may be adjusted with a non-compliant drive such as a ball screw mechanism. The vernier movement can also be used to sense collisions and other positioning errors and actuation of the drive for the vertical support can be controlled accordingly.
Type:
Grant
Filed:
March 1, 2001
Date of Patent:
June 30, 2009
Assignee:
inTEST Corporation
Inventors:
Alyn R. Holt, Brian R. Moore, Henri M. Akouka