Abstract: According to various embodiments, a collimator includes a substrate defining a plurality of channels through the substrate. The substrate includes a first surface and a second surface opposite the first surface. Each of the channels includes a first aperture exposed from the first surface, a second aperture between the first surface and the second surface, and a third aperture exposed from the second surface. The first aperture and the third aperture are larger than the second aperture.
Type:
Grant
Filed:
November 9, 2016
Date of Patent:
May 26, 2020
Assignee:
ADVANCED SEMICONDUCTOR ENGINEERING, INC.
Inventors:
Yuan-Feng Chiang, Tsung-Tang Tsai, Min Lung Huang