Abstract: Techniques are provided herein to form semiconductor devices having thinned semiconductor regions (e.g., thinner nanoribbons) compared to other semiconductor devices on the same substrate and at a comparable height (e.g., within same layer or adjacent layers). In an example, neighboring semiconductor devices of a given memory cell include a p-channel device and an n-channel device. The p-channel device may be a GAA transistor with a semiconductor nanoribbon having a first width while the n-channel device may be a GAA transistor with a semiconductor nanoribbon having a second width that is larger than the first width (e.g., first width is half the second width). The p-channel device may have a thinner width than the corresponding n-channel device in order to structurally lower the operating current through the p-channel devices by decreasing the width of the active semiconductor channel.
Type:
Grant
Filed:
September 13, 2021
Date of Patent:
July 28, 2026
Assignee:
Intel Corporation
Inventors:
Mohammad Hasan, Tahir Ghani, Pratik A. Patel, Leonard P. Guler, Mohit K. Haran, Clifford L. Ong
Abstract: A semiconductor device includes a first substrate; circuit elements on the first substrate; lower interconnection lines electrically connected to the circuit elements; a second substrate on the lower interconnection lines; gate electrodes spaced apart from each other and stacked on the second substrate in a first direction that is perpendicular to an upper surface of the second substrate; channel structures penetrating through the gate electrodes, extending in the first direction, and respectively including a channel layer; through-vias extending in the first direction and electrically connecting at least one of the gate electrodes or the channel structures to the circuit elements; an insulating region surrounding side surfaces of through-vias; and a via pad between the through-vias and at least one of the lower interconnection lines in the first direction and spaced apart from the second substrate in a second direction, parallel to an upper surface of the second substrate.
Type:
Grant
Filed:
December 22, 2021
Date of Patent:
August 19, 2025
Assignee:
Samsung Electronics Co., Ltd.
Inventors:
Donghoon Kwon, Chanwook Seo, Chungki Min, Boun Yoon
Abstract: High-voltage semiconductor device and method of forming the same, the high-voltage semiconductor device includes a substrate, a gate structure, a drain, a first insulating structure and a drain doped region. The gate structure is disposed on the substrate. The drain is disposed in the substrate, at one side of the gate structure. The first insulating structure is disposed on the substrate, under the gate structure to partially overlap with the gate structure. The drain doped region is disposed in the substrate, under the drain and the first insulating structure, and the drain doped region includes a discontinuous bottom surface.
Type:
Grant
Filed:
June 22, 2022
Date of Patent:
August 5, 2025
Assignee:
Vanguard International Semiconductor Corporation
Abstract: A semiconductor structure includes a semiconductor die containing an array of first bonding structures. Each of the first bonding structures includes a first metal pad located within a dielectric material layer and a basin-shaped underbump metallization (UBM) pad located within a respective opening in a passivation dielectric layer and contacting the first metal pad. An interposer includes an array of second bonding structures, wherein each of the second bonding structures includes an underbump metallization (UBM) pillar having a respective cylindrical shape. The semiconductor die is bonded to the interposer through an array of solder material portions that are bonded to a respective one of the first-type bonding structures and to a respective one of the second-type bonding structures.
Type:
Grant
Filed:
April 28, 2022
Date of Patent:
July 15, 2025
Assignee:
Taiwan Semiconductor Manufacturing Company Limited