Patents Examined by Wm. A. Powell
  • Patent number: 4985109
    Abstract: A plasma processing apparatus including a microwave generator, a waveguide for supplying microwaves generated by the microwave generator, a cavity resonator for resonating the microwaves supplied by the waveguide, and a plasma processing chamber. The plasma processing chamber is coupled to the cavity resonator for receiving resonated microwaves therefrom and for generating a plasma therein. The plasma processing chamber is provided with a stage for holding a substrate for plasma processing, and apparatus for introducing a plasma processing gas to the plasma processing chamber for exhausting gas therefrom. A separation plate separates the cavity resonator and the plasma processing chamber and enables resonated microwaves to be transmitted therethrough from the cavity resonator means to the plasma processing chamber.
    Type: Grant
    Filed: February 6, 1990
    Date of Patent: January 15, 1991
    Assignee: Hitachi, Ltd.
    Inventors: Toru Otsubo, Mitsuo Tokuda, Yasuhiro Yamaguchi, Ichirou Sasaki, Kazuhiro Ohara, Hirohisa Usuami, Junzou Azuma
  • Patent number: 4101321
    Abstract: An imaging system wherein an imaged migration-type imaging member is provided and either the background of image areas of said image are selectively reduced to a more transparent condition. The imaged member comprises a softenable layer containing agglomerable materials in both image and complementary background configurations. Such imaged members may be provided by migration imaging techniques described herein. This member is contacted with solvent vapors capable of softening the softenable layer and heated, thereby causing the agglomerable material to selectively agglomerate in one of either the background or image areas.
    Type: Grant
    Filed: September 14, 1970
    Date of Patent: July 18, 1978
    Assignee: Xerox Corporation
    Inventors: Mortimer Levy, William L. Goffe