Abstract: An asymmetric field ion mobility spectrometer for filtering ions via an asyretric electric field, an ion flow generator propulsing ions to the filter via a propulsion field.
Type:
Grant
Filed:
July 8, 2004
Date of Patent:
November 25, 2008
Assignee:
The Charles Stark Draper Laboratory, Inc.
Abstract: Systems and methods for reducing alteration of a specimen during by charged particle based and other measurements systems are provided. One system configured to reduce alteration of a specimen during analysis includes a vacuum chamber in which the specimen is disposed during the analysis and an element disposed within the vacuum chamber. A surface of the element is cooled such that molecules in the vacuum chamber are adsorbed onto the surface and cannot cause alteration of a characteristic of the specimen during the analysis. One system configured to analyze a specimen includes an analysis subsystem configured to analyze the specimen while the specimen is disposed in a vacuum chamber and an element disposed within the vacuum chamber. A surface of the element is cooled such that molecules in the vacuum chamber are adsorbed onto the surface and cannot cause alteration of a characteristic of the specimen during the analysis.
Type:
Grant
Filed:
July 20, 2005
Date of Patent:
July 1, 2008
Assignee:
KLA-Tencor Technologies Corp.
Inventors:
David Soltz, Paul Wieczorek, Aaron Zuo, Gabor Toth
Abstract: A germicidal UV reactor for use in fluid purifiers is provided, in which the UV reactor comprises an UV lamp with an UV transparent primary envelope and also an UV transparent secondary envelope around the primary envelope. The outer surface of the secondary envelope is in contact with a flowing fluid to be purified. There is an isolating space between the outer surface of the primary envelope and the inner surface of the secondary envelope. At least one of the outer surface of the primary envelope and the inner surface of the secondary envelope is provided with electrical means for heating and thus enhancing UV emitting efficiency of the UV lamp.
Abstract: An ion implanter includes an ion beam generator configured to generate an ion beam, a scanner configured to scan the ion beam in at least one direction at a scan frequency, and a controller. The controller is configured to control the scan frequency in response to an operating parameter of the ion implanter. The operating parameter is at least partially dependent on the energy of the ion beam. The scan frequency is greater than a scan frequency threshold if the energy is greater than an energy threshold, and the scan frequency is less than the scan frequency threshold if the energy is less than the energy threshold.
Type:
Grant
Filed:
March 27, 2006
Date of Patent:
April 15, 2008
Assignee:
Varian Semiconductor Equipment Associates, Inc.
Abstract: An apparatus and method for providing direct liquid sample introduction using a nebulizer are provided. The apparatus and method include a short torch having an inner tube and an outer tube, and an elongated adapter having a cavity for receiving the nebulizer and positioning a nozzle tip of the nebulizer a predetermined distance from a tip of the outer tube of the short torch. The predetermined distance is preferably about 2-5 mm.
Type:
Grant
Filed:
December 22, 2004
Date of Patent:
January 8, 2008
Assignee:
The George Washington University
Inventors:
Akbar Montaser, Craig S. Westphal, Kaveh Kahen, William F. Rutkowski
Abstract: In a test head for a scanning probe microscope for the contactless testing of integrated electronic circuits, a group of probes produced by three-dimensional additive lithography is disposed on a substrate. The probes are directed at a point situated centrally above the group of probes. The conducting probes as well as the base end of the capacitive probe are joined to printed circuit trace structures on the substrate for connection to a test circuit.
Abstract: A scattering target for use in a particle beam system is formed from a grid of gold on a substrate of carbon, with an intermediate smoothing layer (e.g. copper) on the carbon to provide a surface sufficiently smooth to provide an adequate target. An optional bonding layer may be used to improve adhesion between the gold and the smoothing layer.
Type:
Grant
Filed:
September 29, 1999
Date of Patent:
April 9, 2002
Assignee:
International Business Machines Corporation
Inventors:
John G. Hartley, Timothy R. Groves, Rodney A. Kendall, Maris A. Sturans