Patents by Inventor A.F. Benschop

A.F. Benschop has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUPPORT FOR AN OPTICAL ELEMENT
    Publication number: 20090185148
    Abstract: The disclosure relates to a support structure for an optical element and an optical element module including such a support structure. The disclosure also relates to a method of supporting an optical element. The disclosure may be used in the context of photolithography processes for fabricating microelectronic devices, such as semiconductor devices, or in the context of fabricating devices, such as masks or reticles, used during such photolithography processes.
    Type: Application
    Filed: January 23, 2009
    Publication date: July 23, 2009
    Applicant: CARL ZEISS SMT AG
    Inventors: Yim-Bun Patrick Kwan, Stefan Xalter, Herman M.J.R. Soemers, R. de Weerdt, A.F. Benschop, Bernard Stommen, Frans van Deuren