Patents by Inventor A. G. Liu

A. G. Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Distributed system and code for control and automation of plasma immersion ion implanter
    Patent number: 6113735
    Abstract: A plasma immersion implantation system (100), including a network for controlling the system. The network communicates to the system by way of packets, which are used to pass signals to and from one of a plurality of controllers. The controllers are used to oversee one of a plurality of processing parameters or field processes such as rf voltage, pressure, etc.
    Type: Grant
    Filed: March 1, 1999
    Date of Patent: September 5, 2000
    Assignee: Silicon Genesis Corporation
    Inventors: Paul K. Chu, A. G. Liu