Patents by Inventor Aaron A. Fernandes

Aaron A. Fernandes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bubble monitor for semiconductor manufacturing
    Patent number: 6013156
    Abstract: Apparatus for monitoring the hydrogen peroxide concentration in a sulfuric acid bath used to remove photoresist from semiconductor wafers uses the amount of bubbles in the fluid mixture to signal the addition of hydrogen peroxide. The bubbles are directly related to the hydrogen peroxide in sulfuric acid mixture. The bubbles are sensed by a light source and photoelectric sensor connected to a threshold adjustment control which controls a metering solenoid valve to add hydrogen peroxide from a reservoir to the bath when the bubbles decrease.
    Type: Grant
    Filed: March 3, 1998
    Date of Patent: January 11, 2000
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Allison Holbrook, Jiahua Huang, Aaron A. Fernandes