Patents by Inventor Aaron Gustafson

Aaron Gustafson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for etch processing with end point detection thereof
    Publication number: 20050130330
    Abstract: A method for performing process end point detection in a semiconductor substrate processing system by monitoring for an increase in a flow of backside gas above a predetermined limit.
    Type: Application
    Filed: December 10, 2004
    Publication date: June 16, 2005
    Inventors: Aaron Gustafson, Daniel Baer, Leonard Moravek, John Kettley