Patents by Inventor Aaron Ingles

Aaron Ingles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas ring and method of processing substrates
    Publication number: 20070087533
    Abstract: A process gas to a reactor volume of a semiconductor processing reactor is provided through gas injector ports of a gas ring. The process gas flows horizontally from the gas injector ports across a principal surface of a rotating susceptor to exhaust ports of the gas ring. The spent process gas is removed from the reactor volume through the exhaust ports.
    Type: Application
    Filed: October 19, 2005
    Publication date: April 19, 2007
    Inventors: Katsuhito Nishikawa, Gary Moore, Aaron Ingles