Patents by Inventor Aaron M. Burry

Aaron M. Burry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11935726
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Grant
    Filed: September 21, 2021
    Date of Patent: March 19, 2024
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron M. Burry, Jonathan W. Smyka, Alexei Marakhtanov, Bing Ji, Felix Leib Kozakevich, John Holland, Ranadeep Bhowmick
  • Patent number: 11715624
    Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: August 1, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Jonathan W. Smyka, Aaron T. Radomski, Peter Paul, Aaron M. Burry
  • Publication number: 20230041177
    Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.
    Type: Application
    Filed: August 9, 2021
    Publication date: February 9, 2023
    Inventors: Jonathan W. SMYKA, Aaron T. RADOMSKI, Peter PAUL, Aaron M. BURRY
  • Patent number: 11536755
    Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: December 27, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Benjamin J. Gitlin, Mariusz Oldziej, Aaron M. Burry, Matthew G. Harrington, Aaron T. Radomski
  • Patent number: 11527384
    Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: December 13, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron M. Burry, Aaron T. Radomski, Mariusz Oldziej, Peter Paul, Ross Reinhardt
  • Publication number: 20220165545
    Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.
    Type: Application
    Filed: November 24, 2020
    Publication date: May 26, 2022
    Inventors: Aaron M. BURRY, Aaron T. RADOMSKI, Mariusz OLDZIEJ, Peter PAUL, Ross REINHARDT
  • Patent number: 11315757
    Abstract: A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: April 26, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Linnell Martinez, Jonathan W. Smyka, Scott White, Aaron M. Burry
  • Publication number: 20220005674
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Application
    Filed: September 21, 2021
    Publication date: January 6, 2022
    Inventors: Aaron T. RADOMSKI, Benjamin J. GITLIN, Larry J. FISK, II, Mariusz OLDZIEJ, Aaron M. BURRY, Jonathan W. SMYKA, Alexei MARAKHTANOV, Bing JI, Felix Leib KOZAKEVICH, John HOLLAND, Ranadeep BHOWMICK
  • Publication number: 20210373054
    Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Larry J. FISK, II, Benjamin J. GITLIN, Mariusz OLDZIEJ, Aaron M. BURRY, Matthew G. HARRINGTON, Aaron T. RADOMSKI
  • Patent number: 11158488
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: October 26, 2021
    Assignees: MKS Instruments, Inc., Lam Research Corporation
    Inventors: Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron M. Burry, Jonathan W. Smyka, Alexei Marakhtanov, Bing Ji, Felix Leib Kozakevich, John Holland, Ranadeep Bhowmick
  • Patent number: 11068966
    Abstract: According to exemplary methods, automated image processing of images from order locations of a multi-lane drive-thru system is continually performed using an automated ordering system. It is automatically determined if a vehicle is present at any of the order locations based on the automated image processing. It is automatically determined if an order has been initiated into the automated ordering system. When the order has been initiated while the vehicle is present at any of the order locations, an automated sequencing processing is automatically begun. The automated sequencing processing determines an order pick-up sequence for picking up orders at pickup windows of the multi-lane drive-thru system. When the order has been initiated while the vehicle is not present at any of the order locations, a potential out-of-sequence warning is automatically associated with the order and output from the automated ordering system.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: July 20, 2021
    Assignee: Conduent Business Services, LLC
    Inventors: Aaron M. Burry, Peter Paul, Orhan Bulan
  • Patent number: 10930470
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: February 23, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
  • Publication number: 20210050185
    Abstract: A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 18, 2021
    Inventors: Linnell MARTINEZ, Jonathan W. SMYKA, Scott WHITE, Aaron M. BURRY
  • Publication number: 20200411289
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Application
    Filed: June 26, 2019
    Publication date: December 31, 2020
    Inventors: Aaron T. RADOMSKI, Benjamin J. GITLIN, Larry J. FISK, II, Mariusz OLDZIEJ, Aaron M. BURRY, Jonathan W. SMYKA, Alexei MARAKHTANOV, Bing JI, Felix Leib KOZAKEVICH, John HOLLAND, Ranadeep BHOWMICK
  • Patent number: 10741363
    Abstract: A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: August 11, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron M. Burry, Aaron T. Radomski, Aung Toe, Jesse N. Klein
  • Publication number: 20200144025
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Application
    Filed: December 11, 2019
    Publication date: May 7, 2020
    Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
  • Patent number: 10546724
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: January 28, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
  • Publication number: 20190287159
    Abstract: According to exemplary methods, automated image processing of images from order locations of a multi-lane drive-thru system is continually performed using an automated ordering system. It is automatically determined if a vehicle is present at any of the order locations based on the automated image processing. It is automatically determined if an order has been initiated into the automated ordering system. When the order has been initiated while the vehicle is present at any of the order locations, an automated sequencing processing is automatically begun. The automated sequencing processing determines an order pick-up sequence for picking up orders at pickup windows of the multi-lane drive-thru system. When the order has been initiated while the vehicle is not present at any of the order locations, a potential out-of-sequence warning is automatically associated with the order and output from the automated ordering system.
    Type: Application
    Filed: June 6, 2019
    Publication date: September 19, 2019
    Applicant: Conduent Business Services, LLC
    Inventors: Aaron M. Burry, Peter Paul, Orhan Bulan
  • Patent number: 10387945
    Abstract: According to exemplary methods, automated image processing of images from order locations of a multi-lane drive-thru system is continually performed using an automated ordering system. It is automatically determined if a vehicle is present at any of the order locations based on the automated image processing. It is automatically determined if an order has been initiated into the automated ordering system. When the order has been initiated while the vehicle is present at any of the order locations, an automated sequencing processing is automatically begun. The automated sequencing processing determines an order pick-up sequence for picking up orders at pickup windows of the multi-lane drive-thru system. When the order has been initiated while the vehicle is not present at any of the order locations, a potential out-of-sequence warning is automatically associated with the order and output from the automated ordering system.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: August 20, 2019
    Assignee: Conduent Business Services, LLC
    Inventors: Aaron M. Burry, Peter Paul, Orhan Bulan
  • Patent number: 10176384
    Abstract: This disclosure provides a method and system for automated sequencing of vehicles in side-by-side drive-thru configurations via appearance-based classification. According to an exemplary embodiment, an automated sequencing method includes computer-implemented method of automated sequencing of vehicles in a side-by-side drive-thru, the method comprising: a) an image capturing device capturing video of a merge-point area associated with multiple lanes of traffic merging; b) detecting in the video a vehicle as it traverses the merge-point area; c) classifying the detected vehicle associated with traversing the merge-point area as coming from one of the merging lanes; and d) aggregating vehicle classifications performed in step c) to generate a merge sequence of detected vehicles.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: January 8, 2019
    Assignee: Conduent Business Services, LLC
    Inventors: Orhan Bulan, Edgar A. Bernal, Aaron M. Burry, Yusuf Oguzhan Artan