Patents by Inventor Aaron Michael Lowe

Aaron Michael Lowe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11735672
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. A conductive gating structure is adjacent to the active region. The conductive gating structure includes an inner region proximate the active region and includes an outer region distal from the active region. The inner region includes a first material containing titanium and nitrogen, and the outer region includes a metal-containing second material. The second material has a higher conductivity than the first material. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: August 22, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Aaron Michael Lowe, Zhuo Chen, Marko Milojevic, Timothy A. Quick, Richard J. Hill, Scott E. Sills
  • Patent number: 11728395
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. The active region includes a first source/drain region, a second source/drain region and a channel region between the first and second source/drain regions. A conductive gating structure is operatively proximate the channel region and comprises molybdenum. The integrated transistor may be incorporated into integrated memory, such as, for example, DRAM, FeFET memory, etc. Some embodiments include methods of forming integrated assemblies and devices, such as, for example, integrated transistors, integrated memory, etc.
    Type: Grant
    Filed: July 18, 2022
    Date of Patent: August 15, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Aaron Michael Lowe
  • Patent number: 11640837
    Abstract: A method used in forming a memory array comprises forming digitlines above and electrically couple to memory cells there-below. The digitlines are laterally-spaced relative one another in a vertical cross-section. An upwardly-open void-space is laterally-between immediately-adjacent of the digitlines in the vertical cross-section. Conductive material of the digitlines is covered with masking material that is in and less-than-fills the upwardly-open void-spaces. The masking material is removed from being directly above tops of the digitlines to expose the conductive digitline material and to leave the masking material over sidewalls of the conductive digitline material in the upwardly-open void-spaces. Insulative material is selectively grown from the exposed conductive digitline material relative to the masking material across the upwardly-open void-spaces to form covered void-spaces there-from between the immediately-adjacent digitlines in the vertical cross-section.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: May 2, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, Richard J. Hill, Aaron Michael Lowe
  • Patent number: 11527623
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. The active region includes a first source/drain region, a second source/drain region and a channel region between the first and second source/drain regions. A conductive gating structure is operatively proximate the channel region and comprises molybdenum. The integrated transistor may be incorporated into integrated memory, such as, for example, DRAM, FeFET memory, etc. Some embodiments include methods of forming integrated assemblies and devices, such as, for example, integrated transistors, integrated memory, etc.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: December 13, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Aaron Michael Lowe
  • Publication number: 20220352324
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. The active region includes a first source/drain region, a second source/drain region and a channel region between the first and second source/drain regions. A conductive gating structure is operatively proximate the channel region and comprises molybdenum. The integrated transistor may be incorporated into integrated memory, such as, for example, DRAM, FeFET memory, etc. Some embodiments include methods of forming integrated assemblies and devices, such as, for example, integrated transistors, integrated memory, etc.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 3, 2022
    Applicant: Micron Technology, Inc.
    Inventor: Aaron Michael Lowe
  • Publication number: 20220310637
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. A conductive gating structure is adjacent to the active region. The conductive gating structure includes an inner region proximate the active region and includes an outer region distal from the active region. The inner region includes a first material containing titanium and nitrogen, and the outer region includes a metal-containing second material. The second material has a higher conductivity than the first material. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: March 29, 2021
    Publication date: September 29, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Aaron Michael Lowe, Zhuo Chen, Marko Milojevic, Timothy A. Quick, Richard J. Hill, Scott E. Sills
  • Publication number: 20220059693
    Abstract: Some embodiments include an integrated assembly having an access device between a storage element and a conductive structure. The access device has channel material which includes semiconductor material. The channel material has a first end and an opposing second end, and has a side extending from the first end to the second end. The first end is adjacent the conductive structure, and the second end is adjacent the storage element. Conductive gate material is adjacent the side of the channel material. A first domed metal-containing cap is over the conductive structure and under the channel material and/or a second domed metal-containing cap is over the channel material and under the storage element. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 20, 2020
    Publication date: February 24, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Yoshitaka Nakamura, Yi Fang Lee, Jerome A. Imonigie, Scott E. Sills, Aaron Michael Lowe
  • Publication number: 20220037483
    Abstract: Some embodiments include an integrated transistor having an active region comprising semiconductor material. The active region includes a first source/drain region, a second source/drain region and a channel region between the first and second source/drain regions. A conductive gating structure is operatively proximate the channel region and comprises molybdenum. The integrated transistor may be incorporated into integrated memory, such as, for example, DRAM, FeFET memory, etc. Some embodiments include methods of forming integrated assemblies and devices, such as, for example, integrated transistors, integrated memory, etc.
    Type: Application
    Filed: July 28, 2020
    Publication date: February 3, 2022
    Applicant: Micron Technology, Inc.
    Inventor: Aaron Michael Lowe
  • Publication number: 20210366525
    Abstract: A method used in forming a memory array comprises forming digitlines above and electrically couple to memory cells there-below. The digitlines are laterally-spaced relative one another in a vertical cross-section. An upwardly-open void-space is laterally-between immediately-adjacent of the digitlines in the vertical cross-section. Conductive material of the digitlines is covered with masking material that is in and less-than-fills the upwardly-open void-spaces. The masking material is removed from being directly above tops of the digitlines to expose the conductive digitline material and to leave the masking material over sidewalls of the conductive digitline material in the upwardly-open void-spaces. Insulative material is selectively grown from the exposed conductive digitline material relative to the masking material across the upwardly-open void-spaces to form covered void-spaces there-from between the immediately-adjacent digitlines in the vertical cross-section.
    Type: Application
    Filed: August 9, 2021
    Publication date: November 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, Richard J. Hill, Aaron Michael Lowe
  • Patent number: 11120852
    Abstract: A method used in forming a memory array comprises forming digitlines above and electrically couple to memory cells there-below. The digitlines are laterally-spaced relative one another in a vertical cross-section. An upwardly-open void-space is laterally-between immediately-adjacent of the digitlines in the vertical cross-section. Conductive material of the digitlines is covered with masking material that is in and less-than-fills the upwardly-open void-spaces. The masking material is removed from being directly above tops of the digitlines to expose the conductive digitline material and to leave the masking material over sidewalls of the conductive digitline material in the upwardly-open void-spaces. Insulative material is selectively grown from the exposed conductive digitline material relative to the masking material across the upwardly-open void-spaces to form covered void-spaces there-from between the immediately-adjacent digitlines in the vertical cross-section.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: September 14, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, Richard J. Hill, Aaron Michael Lowe
  • Publication number: 20210257012
    Abstract: A method used in forming a memory array comprises forming digitlines above and electrically couple to memory cells there-below. The digitlines are laterally-spaced relative one another in a vertical cross-section. An upwardly-open void-space is laterally-between immediately-adjacent of the digitlines in the vertical cross-section. Conductive material of the digitlines is covered with masking material that is in and less-than-fills the upwardly-open void-spaces. The masking material is removed from being directly above tops of the digitlines to expose the conductive digitline material and to leave the masking material over sidewalls of the conductive digitline material in the upwardly-open void-spaces. Insulative material is selectively grown from the exposed conductive digitline material relative to the masking material across the upwardly-open void-spaces to form covered void-spaces there-from between the immediately-adjacent digitlines in the vertical cross-section.
    Type: Application
    Filed: February 18, 2020
    Publication date: August 19, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Armin Saeedi Vahdat, Richard J. Hill, Aaron Michael Lowe