Patents by Inventor Aaron Partidge

Aaron Partidge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anti-stiction technique for electromechanical systems and electromechanical device employing same
    Publication number: 20090065928
    Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure.
    Type: Application
    Filed: November 4, 2008
    Publication date: March 12, 2009
    Inventors: Markus Lutz, Aaron Partidge, Wilhelm Frey, Markus Ulm, Matthias Metz, Brian Stark, Gary Yama