Abstract: Methods of inspecting a material include moving the material and identifying a defect location of a defect. Methods include moving a camera along a second travel path in a second travel direction such that a field of view (FOV) of the camera moves relative to the material along the second travel path to match the defect location. Methods include passing the defect through the field of view (FOV) as the material moves and capturing images of the defect with the camera as the material moves and the defect moves through the FOV. The images include a first image of a first major surface, a second image of a second major surface, and a third image of an intermediate portion of the material between the first major surface and the second major surface. Methods include reviewing the plurality of images to characterize the defect.

Abstract: An apparatus can comprise an illumination source and at least one wave front sensor that positioned in a first region. A reflector can be positioned in a second region. A measurement plane can be positioned between the first region and the second region. The reflector can be configured to reflect the light. The at least one wave front sensor can be configured to detect the light. Methods of measuring a feature of a glass-based substrate can comprise emitting light from the illumination source. Methods can comprise transmitting the light through a thickness of the glass-based substrate. Method can comprise transmitting the light through a target location of a first major surface of the glass-based substrate. Methods can comprise detecting the light with the at least one wave front sensor and generating a signal based on the detected light.